Investigation of incubation in ArF excimer laser irradiated poly(methyl-methacrylate) using pulsed force mode atomic force microscopy

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Abstract

An atomic force microscopic method to study the incubation states of UV laser irradiated polymer samples is presented. Targets were illuminated by different number of pulses at 5.8 and 8.9 mJ/cm2 fluences. The induced adhesive and morphological changes were investigated simultaneously by an atomic force microscope equipped with a pulsed force mode extension. Importantly, below 100 pulses morphological changes were not observable while significant changes in the adhesion were found as a result of the incubation at 8.9 mJ/cm2 fluence. This method allows the imaging and detection of the whole laser modified area with nanometer resolution.

Original languageEnglish
Pages (from-to)5548-5551
Number of pages4
JournalJournal of Applied Physics
Volume96
Issue number10
DOIs
Publication statusPublished - Nov 15 2004

Fingerprint

polymethyl methacrylate
excimer lasers
atomic force microscopy
fluence
pulses
ultraviolet lasers
adhesives
adhesion
microscopes
polymers
lasers

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

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title = "Investigation of incubation in ArF excimer laser irradiated poly(methyl-methacrylate) using pulsed force mode atomic force microscopy",
abstract = "An atomic force microscopic method to study the incubation states of UV laser irradiated polymer samples is presented. Targets were illuminated by different number of pulses at 5.8 and 8.9 mJ/cm2 fluences. The induced adhesive and morphological changes were investigated simultaneously by an atomic force microscope equipped with a pulsed force mode extension. Importantly, below 100 pulses morphological changes were not observable while significant changes in the adhesion were found as a result of the incubation at 8.9 mJ/cm2 fluence. This method allows the imaging and detection of the whole laser modified area with nanometer resolution.",
author = "B. Hopp and T. Smausz and J. Kokavecz and N. Kresz and Z. Bor and S. Hild and O. Marti",
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T1 - Investigation of incubation in ArF excimer laser irradiated poly(methyl-methacrylate) using pulsed force mode atomic force microscopy

AU - Hopp, B.

AU - Smausz, T.

AU - Kokavecz, J.

AU - Kresz, N.

AU - Bor, Z.

AU - Hild, S.

AU - Marti, O.

PY - 2004/11/15

Y1 - 2004/11/15

N2 - An atomic force microscopic method to study the incubation states of UV laser irradiated polymer samples is presented. Targets were illuminated by different number of pulses at 5.8 and 8.9 mJ/cm2 fluences. The induced adhesive and morphological changes were investigated simultaneously by an atomic force microscope equipped with a pulsed force mode extension. Importantly, below 100 pulses morphological changes were not observable while significant changes in the adhesion were found as a result of the incubation at 8.9 mJ/cm2 fluence. This method allows the imaging and detection of the whole laser modified area with nanometer resolution.

AB - An atomic force microscopic method to study the incubation states of UV laser irradiated polymer samples is presented. Targets were illuminated by different number of pulses at 5.8 and 8.9 mJ/cm2 fluences. The induced adhesive and morphological changes were investigated simultaneously by an atomic force microscope equipped with a pulsed force mode extension. Importantly, below 100 pulses morphological changes were not observable while significant changes in the adhesion were found as a result of the incubation at 8.9 mJ/cm2 fluence. This method allows the imaging and detection of the whole laser modified area with nanometer resolution.

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