Investigation of hard-oxide-layers by XES

J. Kojnok, Z. Dankhazi, A. Szász, K. Fluck, Gy Szalai

Research output: Contribution to journalArticle

Abstract

A systematic investigation of vacuum-deposited hard-oxide layers has been made by the complex analysis of relevant technological and measurable spectroscopic parameters. Soft X-ray spectroscopies with electron and fluorescent excitations and special mass- and optical-density measurements were used for the identification of chemical, mechanical and optical properties of the given samples. The relation between chemical-short-range order, density and sample preparation is discussed. The considerable modification of the well-known Clausius-Mosotti rule has been observed depending on the oxygen concentration in the sample.

Original languageEnglish
Pages (from-to)229
Number of pages1
JournalVacuum
Volume40
Issue number1-2
Publication statusPublished - 1990

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Density (optical)
X ray spectroscopy
Oxides
Chemical properties
Optical properties
Vacuum
Oxygen
Mechanical properties
oxides
Electrons
optical density
chemical properties
mechanical properties
optical properties
vacuum
preparation
oxygen
spectroscopy
excitation
electrons

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Kojnok, J., Dankhazi, Z., Szász, A., Fluck, K., & Szalai, G. (1990). Investigation of hard-oxide-layers by XES. Vacuum, 40(1-2), 229.

Investigation of hard-oxide-layers by XES. / Kojnok, J.; Dankhazi, Z.; Szász, A.; Fluck, K.; Szalai, Gy.

In: Vacuum, Vol. 40, No. 1-2, 1990, p. 229.

Research output: Contribution to journalArticle

Kojnok, J, Dankhazi, Z, Szász, A, Fluck, K & Szalai, G 1990, 'Investigation of hard-oxide-layers by XES', Vacuum, vol. 40, no. 1-2, pp. 229.
Kojnok J, Dankhazi Z, Szász A, Fluck K, Szalai G. Investigation of hard-oxide-layers by XES. Vacuum. 1990;40(1-2):229.
Kojnok, J. ; Dankhazi, Z. ; Szász, A. ; Fluck, K. ; Szalai, Gy. / Investigation of hard-oxide-layers by XES. In: Vacuum. 1990 ; Vol. 40, No. 1-2. pp. 229.
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