Investigation of electrical properties of Au porous Si Si structures

M. Ádám, Z. Horváth, I. Bársony, L. Szölgyémy, E. Vázsonyi, Vo Van Tuyen

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

Results of capacitance-voltage (C-V) and capacitance-time measurements performed on Au porous silicon (PS) Si diodes having different porosity and morphology of the obtained porous layer are presented. The C-V characteristics of the studied Au/PS/Si diodes are similar to those of poor metal-insulator-semiconductor capacitors. The porosity dependence of the "insulator" capacitance is interpreted by a model assuming two parallel phases. The results obtained indicate that the C-V measurements may be useful for checking (i) the long-term stability of the metal/PS/Si junctions, (ii) the lateral homogeneity of the wafers, and (iii) the thickness and porosity of the porous layer.

Original languageEnglish
Pages (from-to)266-268
Number of pages3
JournalThin Solid Films
Volume255
Issue number1-2
DOIs
Publication statusPublished - Jan 15 1995

Fingerprint

Porous silicon
Electric properties
Capacitance
Capacitance measurement
Porosity
capacitance
porous silicon
electrical properties
Diodes
Metals
porosity
Voltage measurement
diodes
Electric potential
silicon junctions
Time measurement
capacitance-voltage characteristics
MIS (semiconductors)
Capacitors
electrical measurement

Keywords

  • Dielectric properties
  • Electrical properties
  • measurements
  • Nanostructures
  • Silicon

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces
  • Condensed Matter Physics

Cite this

Investigation of electrical properties of Au porous Si Si structures. / Ádám, M.; Horváth, Z.; Bársony, I.; Szölgyémy, L.; Vázsonyi, E.; Van Tuyen, Vo.

In: Thin Solid Films, Vol. 255, No. 1-2, 15.01.1995, p. 266-268.

Research output: Contribution to journalArticle

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AU - Ádám, M.

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AU - Bársony, I.

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AU - Vázsonyi, E.

AU - Van Tuyen, Vo

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