Investigation of conical structures created by ArF excimer laser irradiation of polycarbonate

B. Hopp, Z. Bor, E. Homolya, E. Mihalik

Research output: Chapter in Book/Report/Conference proceedingConference contribution

37 Citations (Scopus)

Abstract

Conical structures develop on the surface of ArF excimer laser ablated polycarbonate between 20 and 600 mJ/cm2. The cause of this is that the particulate impurities (which are responsible for the formation of cones) are also removed above 600 mJ/cm2 and ablation of polycarbonate does not occur below 20 mJ/cm2. The dependence of the apex angle of the cones on the fluence is investigated. It is shown that the shape of the cones depends on the polarization of the UV beam. A simple computation is proposed to model the formation of the above-mentioned structure. This is in good agreement with the experimental results.

Original languageEnglish
Title of host publicationApplied Surface Science
EditorsC.N. Afonso, E. Matthias, T. Szorenyi
Volume109-110
Publication statusPublished - Jan 1 1997
EventProceedings of the 1996 E-MRS Spring Conference - Strasbourg, Fr
Duration: Jun 4 1996Jun 7 1996

Other

OtherProceedings of the 1996 E-MRS Spring Conference
CityStrasbourg, Fr
Period6/4/966/7/96

Fingerprint

polycarbonate
Excimer lasers
polycarbonates
Laser beam effects
Polycarbonates
excimer lasers
Cones
cones
irradiation
Ablation
particulates
ablation
fluence
apexes
Impurities
Polarization
impurities
causes
polarization

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Hopp, B., Bor, Z., Homolya, E., & Mihalik, E. (1997). Investigation of conical structures created by ArF excimer laser irradiation of polycarbonate. In C. N. Afonso, E. Matthias, & T. Szorenyi (Eds.), Applied Surface Science (Vol. 109-110)

Investigation of conical structures created by ArF excimer laser irradiation of polycarbonate. / Hopp, B.; Bor, Z.; Homolya, E.; Mihalik, E.

Applied Surface Science. ed. / C.N. Afonso; E. Matthias; T. Szorenyi. Vol. 109-110 1997.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hopp, B, Bor, Z, Homolya, E & Mihalik, E 1997, Investigation of conical structures created by ArF excimer laser irradiation of polycarbonate. in CN Afonso, E Matthias & T Szorenyi (eds), Applied Surface Science. vol. 109-110, Proceedings of the 1996 E-MRS Spring Conference, Strasbourg, Fr, 6/4/96.
Hopp B, Bor Z, Homolya E, Mihalik E. Investigation of conical structures created by ArF excimer laser irradiation of polycarbonate. In Afonso CN, Matthias E, Szorenyi T, editors, Applied Surface Science. Vol. 109-110. 1997
Hopp, B. ; Bor, Z. ; Homolya, E. ; Mihalik, E. / Investigation of conical structures created by ArF excimer laser irradiation of polycarbonate. Applied Surface Science. editor / C.N. Afonso ; E. Matthias ; T. Szorenyi. Vol. 109-110 1997.
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