Intermetallic compound formation of Ge-Ni and Ge-Al-Ni systems by furnace annealing and ion beam intermixing

E. Jároli, N. Q. Khanh, G. Mezey, É Zsoldos, B. Kovács, I. Mojzes, T. Lohner, E. Kótai, A. Manuaba, M. Fried, J. Gyulai

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Ge-Ni and Ge-Al-Ni systems are candidates as contact materials for GaAs. This paper offers some data about the effect of aluminium on the formation of intermetallic phases between Ge and Ni. The presence of aluminium caused a phase separation but did not prevent the reaction only a delay was observed and intermetallic compounds were always found with furnace annealing in nitrogen ambient. The phase formation depended upon the aluminium concentration in germanium. For example, 60 at.% of Al in Ge shifted the formation temperature to 600°C and NiAl and Ni5Ge3 phases were detected, in contrast to 30 at.% where this temperature was only 400°C and single Ni5Ge3 phase was obtained. In addition, the Ge-Ni phases were also produced by ion beam intermixing using Ar+ and Xe+ beams. The samples were subjected to RBS and X-ray diffraction to measure the composition and to identify the phase, respectively. An intercomparison between the compounds produced by these two techniques will be presented.

Original languageEnglish
Pages (from-to)703-706
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume15
Issue number1-6
DOIs
Publication statusPublished - Apr 1 1986

Fingerprint

Aluminum
Ion beams
Intermetallics
furnaces
intermetallics
Furnaces
ion beams
Annealing
aluminum
annealing
Germanium
Phase separation
electric contacts
germanium
Nitrogen
nitrogen
X ray diffraction
Temperature
temperature
Chemical analysis

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Intermetallic compound formation of Ge-Ni and Ge-Al-Ni systems by furnace annealing and ion beam intermixing. / Jároli, E.; Khanh, N. Q.; Mezey, G.; Zsoldos, É; Kovács, B.; Mojzes, I.; Lohner, T.; Kótai, E.; Manuaba, A.; Fried, M.; Gyulai, J.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 15, No. 1-6, 01.04.1986, p. 703-706.

Research output: Contribution to journalArticle

@article{7578c9a605c74c5bb941cc5bc739470c,
title = "Intermetallic compound formation of Ge-Ni and Ge-Al-Ni systems by furnace annealing and ion beam intermixing",
abstract = "Ge-Ni and Ge-Al-Ni systems are candidates as contact materials for GaAs. This paper offers some data about the effect of aluminium on the formation of intermetallic phases between Ge and Ni. The presence of aluminium caused a phase separation but did not prevent the reaction only a delay was observed and intermetallic compounds were always found with furnace annealing in nitrogen ambient. The phase formation depended upon the aluminium concentration in germanium. For example, 60 at.{\%} of Al in Ge shifted the formation temperature to 600°C and NiAl and Ni5Ge3 phases were detected, in contrast to 30 at.{\%} where this temperature was only 400°C and single Ni5Ge3 phase was obtained. In addition, the Ge-Ni phases were also produced by ion beam intermixing using Ar+ and Xe+ beams. The samples were subjected to RBS and X-ray diffraction to measure the composition and to identify the phase, respectively. An intercomparison between the compounds produced by these two techniques will be presented.",
author = "E. J{\'a}roli and Khanh, {N. Q.} and G. Mezey and {\'E} Zsoldos and B. Kov{\'a}cs and I. Mojzes and T. Lohner and E. K{\'o}tai and A. Manuaba and M. Fried and J. Gyulai",
year = "1986",
month = "4",
day = "1",
doi = "10.1016/0168-583X(86)90395-2",
language = "English",
volume = "15",
pages = "703--706",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",
number = "1-6",

}

TY - JOUR

T1 - Intermetallic compound formation of Ge-Ni and Ge-Al-Ni systems by furnace annealing and ion beam intermixing

AU - Jároli, E.

AU - Khanh, N. Q.

AU - Mezey, G.

AU - Zsoldos, É

AU - Kovács, B.

AU - Mojzes, I.

AU - Lohner, T.

AU - Kótai, E.

AU - Manuaba, A.

AU - Fried, M.

AU - Gyulai, J.

PY - 1986/4/1

Y1 - 1986/4/1

N2 - Ge-Ni and Ge-Al-Ni systems are candidates as contact materials for GaAs. This paper offers some data about the effect of aluminium on the formation of intermetallic phases between Ge and Ni. The presence of aluminium caused a phase separation but did not prevent the reaction only a delay was observed and intermetallic compounds were always found with furnace annealing in nitrogen ambient. The phase formation depended upon the aluminium concentration in germanium. For example, 60 at.% of Al in Ge shifted the formation temperature to 600°C and NiAl and Ni5Ge3 phases were detected, in contrast to 30 at.% where this temperature was only 400°C and single Ni5Ge3 phase was obtained. In addition, the Ge-Ni phases were also produced by ion beam intermixing using Ar+ and Xe+ beams. The samples were subjected to RBS and X-ray diffraction to measure the composition and to identify the phase, respectively. An intercomparison between the compounds produced by these two techniques will be presented.

AB - Ge-Ni and Ge-Al-Ni systems are candidates as contact materials for GaAs. This paper offers some data about the effect of aluminium on the formation of intermetallic phases between Ge and Ni. The presence of aluminium caused a phase separation but did not prevent the reaction only a delay was observed and intermetallic compounds were always found with furnace annealing in nitrogen ambient. The phase formation depended upon the aluminium concentration in germanium. For example, 60 at.% of Al in Ge shifted the formation temperature to 600°C and NiAl and Ni5Ge3 phases were detected, in contrast to 30 at.% where this temperature was only 400°C and single Ni5Ge3 phase was obtained. In addition, the Ge-Ni phases were also produced by ion beam intermixing using Ar+ and Xe+ beams. The samples were subjected to RBS and X-ray diffraction to measure the composition and to identify the phase, respectively. An intercomparison between the compounds produced by these two techniques will be presented.

UR - http://www.scopus.com/inward/record.url?scp=0022041952&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0022041952&partnerID=8YFLogxK

U2 - 10.1016/0168-583X(86)90395-2

DO - 10.1016/0168-583X(86)90395-2

M3 - Article

VL - 15

SP - 703

EP - 706

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

IS - 1-6

ER -