Interfacial reactions in single-crystal-TiN (100)/Al/polycrystalline-TiN multilayer thin films

L. Hultman, S. Benhenda, G. Radnóczi, J. E. Sundgren, J. E. Greene, I. Petrov

Research output: Contribution to journalArticle

45 Citations (Scopus)

Abstract

The thermal stability of Al/polycrystalline-TiN and Al/single-crystal-TiN couples was investigated using Auger electron spectroscopy (AES) and cross-sectional transmission electron microscopy (XTEM) with energy-dispersive X-ray spectroscopy (EDX). The trilayer samples consisted of a 100 nm thick epitaxial TiN layer grown on MgO(100) substrates, a 100 nm thick aluminium layer, and a 100 nm thick polycrystalline TiN layer. The multilayer films were grown in a dual-magnetron sputter-deposition system and then annealed in a reducing atmosphere at temperatures between 500 and 600 °C for up to 90 min. AES and EDX showed extensive penetration of titanium into the aluminum layer, but only limited interdiffusion of aluminum into both single-crystal and polycrystalline TiN. However, aluminum segregation occurred at both Al/TiN interfaces. XTEM examination revealed the formation of the ordered aluminum-rich AlTi intermetallic compoundssuch as Al3Ti in the aluminum layer, while cubic-structure AIN formed at the AlTiN interfaces. Only small differences were observed in the reaction paths and product formation rates of Al/polycrystalline-TiN and Al/single-crystal-TiN couples. AlTi intermetallic compounds formed more rapidly in the former while AIN formation proceeded more rapidly at the Al/single-crystal-TiN interface.

Original languageEnglish
Pages (from-to)152-161
Number of pages10
JournalThin Solid Films
Volume215
Issue number2
DOIs
Publication statusPublished - Aug 14 1992

Fingerprint

Multilayer films
Surface chemistry
Aluminum
Single crystals
aluminum
Thin films
single crystals
thin films
Auger electron spectroscopy
Auger spectroscopy
Intermetallics
intermetallics
electron spectroscopy
Sputter deposition
Epitaxial layers
Titanium
spectroscopy
Thermodynamic stability
x rays
thermal stability

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Interfacial reactions in single-crystal-TiN (100)/Al/polycrystalline-TiN multilayer thin films. / Hultman, L.; Benhenda, S.; Radnóczi, G.; Sundgren, J. E.; Greene, J. E.; Petrov, I.

In: Thin Solid Films, Vol. 215, No. 2, 14.08.1992, p. 152-161.

Research output: Contribution to journalArticle

Hultman, L. ; Benhenda, S. ; Radnóczi, G. ; Sundgren, J. E. ; Greene, J. E. ; Petrov, I. / Interfacial reactions in single-crystal-TiN (100)/Al/polycrystalline-TiN multilayer thin films. In: Thin Solid Films. 1992 ; Vol. 215, No. 2. pp. 152-161.
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