Interface broadening due to Ar+ ion bombardment measured on Co/Cu multilayer at grazing angle of incidence

A. Barna, M. Menyhard, G. Zsolt, A. Koos, A. Zalar, P. Panjan

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A Co-Cu multilayer system was depth profiled by 1 keV Ar+ ions varying the angle of incidence in the range of 78°-86°. The specimen was rotated during ion sputtering. Using these sputtering conditions, it was observed that the relative sputter rate of Cu to Co depend on the angle of incidence, the broadening of the Co/Cu interface is much stronger than that of the Cu/Co interface and, the interface broadening of the Co/Cu interface increases with the increase of the relative sputter rate.

Original languageEnglish
Pages (from-to)553-557
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number3
Publication statusPublished - May 1 2003


ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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