Intercomparison of ion beam analysis software for the simulation of backscattering spectra from two-dimensional structures

M. Mayer, P. Malinský, F. Schiettekatte, Z. Zolnai

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

The codes RBS-MAST, STRUCTNRA, F95-Rough and CORTEO are simulation codes for ion beam analysis spectra from two- or three-dimensional sample structures. The codes were intercompared in a code-code comparison using an idealized grating structure and by comparison to experimental data from a silicon grating on tantalum interlayer. All codes are in excellent agreement at higher incident energies and not too large energy losses. At lower incident energies, grazing angles of incidence and/or larger energy losses plural scattering effects play an increasing role. Simulation codes with plural scattering capabilities offer higher accuracy and better agreement to experimental results in this regime.

Original languageEnglish
Pages (from-to)65-73
Number of pages9
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume385
DOIs
Publication statusPublished - Oct 15 2016

Keywords

  • Computer simulation
  • Ion beam analysis

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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