Interaction of copper metallization with rare-earth metals and silicides

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Abstract

Solid-phase reactions of copper films with underlying gadolinium, erbium, and erbium-silicide layers on Si(100) substrates were investigated. For the phase analysis, x-ray diffraction and cross-sectional transmission electron microscopy were used. In the case of Cu/Gd/Si(100), an orthorhombic GdSi2 formed, and, at higher temperatures, copper aggregated into islands. Annealed Cu/Er/Si(100) samples resulted in a hexagonal Er5Si3 phase. In the Cu/ErSi2-x/Si system, the copper catalyzes the transformation of the highly oriented hexagonal ErSi2-x phase into hexagonal Er5Si3. Diverse phase developments of the samples with Gd and Er are based on reactivity differences of the two rare-earth metals.

Original languageEnglish
Pages (from-to)503-505
Number of pages3
JournalJournal of Applied Physics
Volume90
Issue number1
DOIs
Publication statusPublished - Jul 1 2001

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

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