Intelligent vacuum system controller

S. Fekete, G. Langer, S. Bohatka, I. Gal, J. Gal, K. Sepsy, J. Szadai

Research output: Contribution to journalConference article

Original languageEnglish
Number of pages1
JournalVacuum
Volume40
Issue number1-2
DOIs
Publication statusPublished - Jan 1 1990
EventSelected Proceedings of the Yugoslav-Austrian-Hungarian Fourth Joint Vacuum Conference - Portoroz, Yugosl
Duration: Sep 20 1988Sep 23 1988

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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    Fekete, S., Langer, G., Bohatka, S., Gal, I., Gal, J., Sepsy, K., & Szadai, J. (1990). Intelligent vacuum system controller. Vacuum, 40(1-2). https://doi.org/10.1016/0042-207x(90)90176-y