Influence of sputtering on the surface composition of MoNi alloys

K. Lawniczak-Jablonska, M. Heinonen, A. Sulyok

Research output: Contribution to journalArticle

1 Citation (Scopus)


The surface composition of several MoNi alloys was studied by X-ray photoelectron spectroscopy (XPS). The surface of each sample was scraped in situ and extensively sputtered by 1 keV Ar+ ions. It was assumed that the surface composition after scraping is identical to the bulk composition. The ratio of the Mo and Ni elemental sensitivity factors was estimated as a function of the alloy composition. The change of surface composition during bombardment with 1 keV Ar+ was also determined. The steady state composition was established and the ratio of elemental sputtering yields as a function of alloy composition was estimated. It was shown that the assumption of constant sensitivity factors and sputtering yields may result in a pronounced error in the quantitative XPS analysis. The influence of annealing on the surface composition was investigated for 25 at% Mo by Auger electron spectroscopy (AES). It was found that the surface is enriched in Ni after annealing.

Original languageEnglish
Pages (from-to)129-139
Number of pages11
JournalSurface Science
Issue number1
Publication statusPublished - Nov 2 1989


ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this