Influence of layer thickness on the photoluminescence and Raman scattering of a-C:H prepared from benzene

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Abstract

How the layer thickness influences the atomic scale bonding structure and the light emission of hydrogenated amorphous carbon (a-C:H) was addressed in our investigations. For this purpose a-C:H films of different thicknesses (60-2249 nm) were prepared from benzene by plasma enhanced chemical vapour deposition method. Photoluminescence (PL) investigations performed in a broad emission and excitation energy region exhibit a considerable change of luminescence with layer thickness. The photon energy of maximal efficiency shifts into the lower energy region. The optical band gap decreases also as the layer thickness increases. Raman spectra were measured by 785 nm excitation. A considerable broadening of the G band region parallel with its shift to smaller wavenumbers with increasing layer thickness was generally observed. Luminescence properties will be discussed in the framework of structural changes monitored by the Raman scattering investigations.

Original languageEnglish
Pages (from-to)967-971
Number of pages5
JournalDiamond and Related Materials
Volume15
Issue number4-8
DOIs
Publication statusPublished - Apr 1 2006

Keywords

  • Bonding configurations
  • Diamond like carbon
  • Optical properties
  • Plasma CVD

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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