Industrial-scale deposition of highly adherent CNx films on steel substrates

E. Broitman, Z. Czigány, G. Greczynski, J. Böhlmark, R. Cremer, L. Hultman

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

Highly adherent carbon nitride (CNx) films were deposited using a novel pretreatment with two high power impulse magnetron sputtering (HIPIMS) power supplies in a master-slave configuration: one to establish the discharge and one to produce a pulsed substrate bias. During the pretreatment, SKF3 (AISI 52100) steel substrates were pulse-biased in the environment of a HIPIMS Cr plasma in order to sputter clean the surface and to implant Cr metal ions. Subsequently, CNx films were prepared at room temperature by DC unbalanced magnetron sputtering from a high purity graphite target in a N2/Ar discharge at 3mTorr. All processing was done in an industrial CemeCon CC800 system. A series of depositions were obtained with samples at different bias voltages (DC and pulsed) in the range of 0-800V. Scanning transmission microscopy (STEM) and high resolution transmission electron microscopy (HRTEM) show the formation of an interface comprising a polycrystalline Cr layer of 100nm and an amorphous transition layer of 5nm. The adhesion of CNx films evaluated by the Daimler-Benz Rockwell-C reach strength quality HF1, and the scratch tests gives critical loads of 84N. Adhesion results are correlated to the formation of an optimal interfacial mixing layer of Cr and steel.

Original languageEnglish
Pages (from-to)3349-3357
Number of pages9
JournalSurface and Coatings Technology
Volume204
Issue number21-22
DOIs
Publication statusPublished - Aug 2010

Fingerprint

Steel
Magnetron sputtering
magnetron sputtering
steels
pretreatment
impulses
adhesion
Substrates
Adhesion
direct current
transition layers
carbon nitrides
Graphite
Carbon nitride
High resolution transmission electron microscopy
Bias voltage
power supplies
Metal ions
metal ions
Microscopic examination

Keywords

  • Adhesion
  • Carbon nitride
  • CN
  • HIPIMS
  • HPPMS

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Industrial-scale deposition of highly adherent CNx films on steel substrates. / Broitman, E.; Czigány, Z.; Greczynski, G.; Böhlmark, J.; Cremer, R.; Hultman, L.

In: Surface and Coatings Technology, Vol. 204, No. 21-22, 08.2010, p. 3349-3357.

Research output: Contribution to journalArticle

Broitman, E, Czigány, Z, Greczynski, G, Böhlmark, J, Cremer, R & Hultman, L 2010, 'Industrial-scale deposition of highly adherent CNx films on steel substrates', Surface and Coatings Technology, vol. 204, no. 21-22, pp. 3349-3357. https://doi.org/10.1016/j.surfcoat.2010.03.038
Broitman, E. ; Czigány, Z. ; Greczynski, G. ; Böhlmark, J. ; Cremer, R. ; Hultman, L. / Industrial-scale deposition of highly adherent CNx films on steel substrates. In: Surface and Coatings Technology. 2010 ; Vol. 204, No. 21-22. pp. 3349-3357.
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