In situ electron microscopy of thin film growth

Jenö F. Pócza, A. Barna, P. Barna, Imre Pozsgai, G. Radnóczi

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

Corresponding to the demands in the investigation of different thin film phenomena, the in-situ electron microscopic technique has been developed in different directions. A review of such development is given. Furthermore, experimental conditions ensuring reliable quantitative results are discussed. The phase transitions occuring during thin film growth, i.e. liquid-crystalline, and amorphous-crystalline transitions are dealt with, demonstrations being given by the examples of In, Ge and Sb films. The discussion is focused on the effect of gaseous contamination on the processes.

Original languageEnglish
Pages (from-to)525-532
Number of pages8
JournalJapanese Journal of Applied Physics
Volume13
DOIs
Publication statusPublished - 1974

Fingerprint

Film growth
Electron microscopy
electron microscopy
Crystalline materials
Thin films
thin films
contamination
Contamination
Demonstrations
Phase transitions
Electrons
Liquids
liquids
electrons

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

In situ electron microscopy of thin film growth. / Pócza, Jenö F.; Barna, A.; Barna, P.; Pozsgai, Imre; Radnóczi, G.

In: Japanese Journal of Applied Physics, Vol. 13, 1974, p. 525-532.

Research output: Contribution to journalArticle

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