IN SITU ELECTRON MICROSCOPY OF THIN FILM GROWTH.

Jeno F. Pocza, A. Barna, P. Barna, Imre Pozsgai, G. Radnóczi

Research output: Chapter in Book/Report/Conference proceedingChapter

3 Citations (Scopus)

Abstract

The in-situ electron microscopic technique developed for the investigation of diverse thin film phenomena is described, and experimental conditions which assure reliable quantitative results are discussed. The phase transitions occuring during thin film growth, i. e. liquid-crystalline and amorphous-crystalline transitions are dealt with, demonstrations being given by the examples of In, Ge and Sb films. The discussion is focused on the effect of gaseous contamination on the processes.

Original languageEnglish
Title of host publicationUnknown Host Publication Title
PublisherJpn J Appl Phys (Suppl 2 pt 1
Pages525-532
Number of pages8
Publication statusPublished - 1974
EventInt Vac Congr, 6th, Proc - Kyoto, Jpn
Duration: Mar 25 1974Mar 29 1974

Other

OtherInt Vac Congr, 6th, Proc
CityKyoto, Jpn
Period3/25/743/29/74

Fingerprint

Film growth
Electron microscopy
Crystalline materials
Thin films
Contamination
Demonstrations
Phase transitions
Electrons
Liquids

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Pocza, J. F., Barna, A., Barna, P., Pozsgai, I., & Radnóczi, G. (1974). IN SITU ELECTRON MICROSCOPY OF THIN FILM GROWTH. In Unknown Host Publication Title (pp. 525-532). Jpn J Appl Phys (Suppl 2 pt 1.

IN SITU ELECTRON MICROSCOPY OF THIN FILM GROWTH. / Pocza, Jeno F.; Barna, A.; Barna, P.; Pozsgai, Imre; Radnóczi, G.

Unknown Host Publication Title. Jpn J Appl Phys (Suppl 2 pt 1, 1974. p. 525-532.

Research output: Chapter in Book/Report/Conference proceedingChapter

Pocza, JF, Barna, A, Barna, P, Pozsgai, I & Radnóczi, G 1974, IN SITU ELECTRON MICROSCOPY OF THIN FILM GROWTH. in Unknown Host Publication Title. Jpn J Appl Phys (Suppl 2 pt 1, pp. 525-532, Int Vac Congr, 6th, Proc, Kyoto, Jpn, 3/25/74.
Pocza JF, Barna A, Barna P, Pozsgai I, Radnóczi G. IN SITU ELECTRON MICROSCOPY OF THIN FILM GROWTH. In Unknown Host Publication Title. Jpn J Appl Phys (Suppl 2 pt 1. 1974. p. 525-532
Pocza, Jeno F. ; Barna, A. ; Barna, P. ; Pozsgai, Imre ; Radnóczi, G. / IN SITU ELECTRON MICROSCOPY OF THIN FILM GROWTH. Unknown Host Publication Title. Jpn J Appl Phys (Suppl 2 pt 1, 1974. pp. 525-532
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