IMPURITY EFFECTS IN THE STRUCTURAL DEVELOPMENT OF VACUUM DEPOSITED THIN FILMS.

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32 Citations (Scopus)

Abstract

Many results of thin film studies prove that impurities are accumulated at the surface of crystals or at the grain boundaries, and are responsible for the structural, physical and chemical properties of films. The accumulated form of impurities enables to understand why impurities can be extremely active in determining the structural development also at very low concentration. The paper reviews some of these results and point to the situation that the various structural peculiarities of crystalline and amorphous films can be understood better when films are considered as multicomponent systems. Models proposed to describe the participation of impurities in the growth processes of crystals, amorphous grains and in their coalescence are discussed. It is shown that these processes can accumulate the impurity molecules.

Original languageEnglish
Title of host publicationUnknown Host Publication Title
EditorsJose L. de Segovia
PublisherAsociacion Espanola de Vacio y sus Aplicaciones
Pages382-396
Number of pages15
ISBN (Print)8430099816
Publication statusPublished - Dec 1 1983

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Barna, P. B. (1983). IMPURITY EFFECTS IN THE STRUCTURAL DEVELOPMENT OF VACUUM DEPOSITED THIN FILMS. In J. L. de Segovia (Ed.), Unknown Host Publication Title (pp. 382-396). Asociacion Espanola de Vacio y sus Aplicaciones.