Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by `COSMOS' program simulation

M. Dumitrescu, C. Cobianu, D. Lungu, D. Dascalu, A. Pascu, A. van den Berg, J. G E Gardeniers, S. Kolev, C. Dücső, I. Bársony

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The application of commercial 3-D software `COSMOS' for the design and thermal analysis of the low power consumption test structures with dielectric membrane for gas microsensors is presented. Within this work, the simulation provides the estimation of the temperature profile on the active area and the whole membrane including the four bridges and the heating efficiency in the temperature range 20-500 °C. Unravelling of the heat loss mechanisms in terms of radiation, convection, conduction by air and solid materials during heat transfer on the dielectric membrane is reported for the first time as a mean to evaluate by 3-D simulation the contribution of technological processes and lay-out design to the total heat losses.

Original languageEnglish
Title of host publicationProceedings of the International Semiconductor Conference, CAS
PublisherIEEE
Pages145-148
Number of pages4
Volume1
Publication statusPublished - 1997
EventProceedings of the 1997 International Semiconductor Conference, CAS. Part 1 (of 2) - Sinaia, Romania
Duration: Oct 7 1997Oct 11 1997

Other

OtherProceedings of the 1997 International Semiconductor Conference, CAS. Part 1 (of 2)
CitySinaia, Romania
Period10/7/9710/11/97

Fingerprint

Chemical sensors
Heat transfer
Membranes
Heat losses
Microsensors
Temperature
Thermoanalysis
Enthalpy
Electric power utilization
Radiation
Heating
Air
Gases

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Dumitrescu, M., Cobianu, C., Lungu, D., Dascalu, D., Pascu, A., van den Berg, A., ... Bársony, I. (1997). Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by `COSMOS' program simulation. In Proceedings of the International Semiconductor Conference, CAS (Vol. 1, pp. 145-148). IEEE.

Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by `COSMOS' program simulation. / Dumitrescu, M.; Cobianu, C.; Lungu, D.; Dascalu, D.; Pascu, A.; van den Berg, A.; Gardeniers, J. G E; Kolev, S.; Dücső, C.; Bársony, I.

Proceedings of the International Semiconductor Conference, CAS. Vol. 1 IEEE, 1997. p. 145-148.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Dumitrescu, M, Cobianu, C, Lungu, D, Dascalu, D, Pascu, A, van den Berg, A, Gardeniers, JGE, Kolev, S, Dücső, C & Bársony, I 1997, Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by `COSMOS' program simulation. in Proceedings of the International Semiconductor Conference, CAS. vol. 1, IEEE, pp. 145-148, Proceedings of the 1997 International Semiconductor Conference, CAS. Part 1 (of 2), Sinaia, Romania, 10/7/97.
Dumitrescu M, Cobianu C, Lungu D, Dascalu D, Pascu A, van den Berg A et al. Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by `COSMOS' program simulation. In Proceedings of the International Semiconductor Conference, CAS. Vol. 1. IEEE. 1997. p. 145-148
Dumitrescu, M. ; Cobianu, C. ; Lungu, D. ; Dascalu, D. ; Pascu, A. ; van den Berg, A. ; Gardeniers, J. G E ; Kolev, S. ; Dücső, C. ; Bársony, I. / Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by `COSMOS' program simulation. Proceedings of the International Semiconductor Conference, CAS. Vol. 1 IEEE, 1997. pp. 145-148
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