High spatial resolution Makyoh topography using shifted grid illumination

István E. Lukács, F. Riesz, Zsolt J. Laczik

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

A high spatial resolution version of structured-illumination Makyoh topography is realised based on spatially modulated grid illumination. Accurate high spatial resolution specimen surface height profiles are calculated from a series of recorded Makyoh images. Experimental results from various semiconductor specimens are shown and compared to interferometric measurements. Potential sources of errors, and the limitations and speed of the evaluation method are discussed.

Original languageEnglish
Pages (from-to)271-276
Number of pages6
JournalPhysica Status Solidi (A) Applied Research
Volume195
Issue number1 SPEC
DOIs
Publication statusPublished - Jan 2003

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Topography
topography
spatial resolution
Lighting
illumination
grids
high resolution
Semiconductor materials
evaluation
profiles

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

High spatial resolution Makyoh topography using shifted grid illumination. / Lukács, István E.; Riesz, F.; Laczik, Zsolt J.

In: Physica Status Solidi (A) Applied Research, Vol. 195, No. 1 SPEC, 01.2003, p. 271-276.

Research output: Contribution to journalArticle

Lukács, István E. ; Riesz, F. ; Laczik, Zsolt J. / High spatial resolution Makyoh topography using shifted grid illumination. In: Physica Status Solidi (A) Applied Research. 2003 ; Vol. 195, No. 1 SPEC. pp. 271-276.
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