High-Sensitivity Ion Beam Analytical Method for Studying Ion-Implanted SiC

G. Battistig, J. Garcia Lopez, N. Q. Khanh, Y. Morilla, M. A. Respaldiza, E. Szilágyi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The combination of Backscattering Spectrometry and channeling with the 12C(α,α)12C nuclear resonance at 4.26 MeV to study radiation damage in the carbon sublattice of 6H-SiC was applied. 6H SiC samples were implanted with 200 keV Al ions in a dose range of 4×10 14 cm-2 - 1×1016 cm-2 with different current densities at room temperatures. The implanted samples were annealed at 1200°C in argon for 1 hour. In the case of low dose, low current density implantation damage recovery seems to be complete.

Original languageEnglish
Title of host publicationMaterials Science Forum
EditorsPeder Bergman, Erik Janzén
PublisherTrans Tech Publications Ltd
Pages625-628
Number of pages4
ISBN (Print)9780878499205
DOIs
Publication statusPublished - Jan 1 2003
EventProceedings of the 4th European Conference on Silicon Carbide and Related Materials - Linkoping, Sweden
Duration: Sep 2 2002Sep 5 2002

Publication series

NameMaterials Science Forum
Volume433-436
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Conference

ConferenceProceedings of the 4th European Conference on Silicon Carbide and Related Materials
CountrySweden
CityLinkoping
Period9/2/029/5/02

Keywords

  • Backscattering Spectrometry
  • Channeling
  • Ion Implantation
  • Silicon Carbide

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Battistig, G., Garcia Lopez, J., Khanh, N. Q., Morilla, Y., Respaldiza, M. A., & Szilágyi, E. (2003). High-Sensitivity Ion Beam Analytical Method for Studying Ion-Implanted SiC. In P. Bergman, & E. Janzén (Eds.), Materials Science Forum (pp. 625-628). (Materials Science Forum; Vol. 433-436). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/msf.433-436.625