High sensitivity convergent beam electron diffraction for the determination of the tetragonal distortion of epitaxial films

C. Schuer, M. Leicht, T. Marek, H. P. Strunk

Research output: Contribution to journalArticle

Abstract

We have optimized the sensitivity of convergent beam electron diffraction (CBED) by orienting the specimen such that the central (000) diffraction disc shows a pattern of defect lines that are most sensitive to tetragonal distortion. We compare the position of these lines in the experimentally obtained patterns with results from computer simulations, which need to be based on dynamical diffraction theory. In both experimental and simulated patterns the positions of the defect lines are determined by applying a Hough transformation. As a result of this optimized approach, we can measure the tetragonal distortion of a low temperature grown GaAs layer as low as 0.04%.

Original languageEnglish
Pages (from-to)93-98
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume589
Publication statusPublished - Dec 1 2000

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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