High resolution thermal mapping of microcircuits using nematic liquid crystals

G. Aszódi, J. Szabon, I. Jánossy, V. Székely

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

An improved method for high resolution thermal mapping is discussed. This method utilizes nematic liquid crystals and has been primarily applied to inspect microcircuits. By making use of two nematic liquid crystals in conjunction with reflected light polarizing microscopy a thermal resolution of about 0.05 K has been achieved. Resolution limits are considered in detail for heat generation occurring at some depth from the surface of the sample. In addition, a comparison is made between the commonly used cholesteric method and the present work. To demonstrate the capability of the method the thermal mapping of an LED is shown.

Original languageEnglish
Pages (from-to)1127-1133
Number of pages7
JournalSolid State Electronics
Volume24
Issue number12
DOIs
Publication statusPublished - Dec 1981

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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