High-depth-resolution Auger depth profiling/atomic mixing

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

The ion-bombardment-induced defects and their effect on the capability of Auger depth profiling is reviewed and discussed. It is shown that by using low ion energy (< 1 keV) and grazing angle of incidence (> 80°), the quasi-quantitative detection of layers with thickness of 1 nm can be achieved. We discuss the possible evaluation routines for Auger depth profiling. In a case study, we demonstrate the performance of a novel evaluation routine based on TRIM simulation. We show by the help of the case study that, by depth profiling specimen of known structure, we can deduce data concerning atomic mixing. The close connection between Auger depth profiling and ion milling is also discussed.

Original languageEnglish
Pages (from-to)255-265
Number of pages11
JournalMicron
Volume30
Issue number3
DOIs
Publication statusPublished - Jun 1 1999

Keywords

  • Atomic mixing
  • Auger depth profiling
  • Ion-induced damage
  • TRIM simulation

ASJC Scopus subject areas

  • Structural Biology
  • Materials Science(all)
  • Physics and Astronomy(all)
  • Cell Biology

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