Hardness, stress relaxation and microstructure of TiBN multilayer coatings

T. Friesen, J. Haupt, W. Gissler, A. Barna, PB Barna

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Multilayer coatings of a TiBN layer sequence have been prepared by sequential sputtering from a Ti cathode and a h-BN cathode. These layers were subjected to thermal treatment at 400°C by which a hardening process as consequence of interdiffusion was observed. Hardness values of up to 60 GPawere obtained. In contrast to most other hard coatings these TiBN coatings display only small macroscopic stress of the order of ±1 GPa as measured by the substrate bending method. Tensile or compressive stress can be engineered by correctly choosing the repeat thickness and the individual layer ratio. TEM investigations suggest that these low stress values are due to an internal stress relaxation process. The individual multilayers are subjected to a high microscopic internal stress resulting in fragmentation into very small pieces of about 50 nm. This is supported by the strong bending of these fragments as observed in the TEM micrographs.

Original languageEnglish
Pages (from-to)657-659
Number of pages3
JournalVacuum
Volume43
Issue number5-7
DOIs
Publication statusPublished - Jan 1 1992

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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