Generation of diffraction-free beams for applications in optical microlithography

M. Erdélyi, Z. L. Horváth, G. Szabó, Zs Bor, F. K. Tittel, J. R. Cavallaro, M. C. Smayling

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Abstract

A new concept based on a Fabry-Pérot interferometer for the generation of nondiffracting Bessel beams is described and proposed for potential applications in microlithography such as the fabrication of small isolated patterns. It was experimentally demonstrated that the depth of focus can be increased by a factor of about 2, and simultaneously the transverse resolution improved by a factor of 1.6, when using this technique to image contact holes. The properties of simultaneous imaging of two contact holes were also investigated. It was shown experimentally that, even in the most critical case (when the first diffraction rings overlap), undesirable interference effects between the adjacent contact holes can be eliminated by means of a phase shifting technique.

Original languageEnglish
Pages (from-to)287-292
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume15
Issue number2
Publication statusPublished - Mar 1 1997

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Erdélyi, M., Horváth, Z. L., Szabó, G., Bor, Z., Tittel, F. K., Cavallaro, J. R., & Smayling, M. C. (1997). Generation of diffraction-free beams for applications in optical microlithography. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 15(2), 287-292.