GasFET for the detection of reducing gases

U. Lampe, E. Simon, R. Pohle, M. Fleischer, H. Meixner, H. P. Frerichs, M. Lehmann, G. Kiss

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

A new gas sensor technology based on the signal read out of the work function change on sensitive films of thin or thick film SnO2 or Ga2O3 is used for the detection of reducing gases. The thick films are catalytic activated with Pd. The sensor device consists of a field effect transistor (FET) with suspended gate electrode prepared in hybrid flip chip technology (HFC-FET). Measurements with a Kelvin probe for testing the sensitive properties of the films and with complete assembled GasFET were performed. The SnO2 thick films activated with Pd show a high sensitivity to CO, hence concentrations lower than 1 vpm can be detected. The sensor response decreases with increasing temperature. A high cross sensitivity to oxygen and humidity is found only for very low oxygen concentrations (∼0 vol.%) or low humidity (∼0% r.h.). Thick films of SnO2 show a similar behavior to changes in the gas atmosphere in measurements performed using the Kelvin probe and with completely assembled GasFET sensors.

Original languageEnglish
Pages (from-to)106-110
Number of pages5
JournalSensors and Actuators, B: Chemical
Volume111-112
Issue numberSUPPL.
DOIs
Publication statusPublished - Nov 11 2005

Fingerprint

Thick films
thick films
Gases
sensors
Field effect transistors
gases
humidity
Atmospheric humidity
Sensors
field effect transistors
Oxygen
probes
sensitivity
oxygen
Carbon Monoxide
Chemical sensors
low concentrations
chips
atmospheres
Thin films

Keywords

  • Field effect transistor
  • Low power work function type gas sensor
  • Reducing gases

ASJC Scopus subject areas

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

Cite this

Lampe, U., Simon, E., Pohle, R., Fleischer, M., Meixner, H., Frerichs, H. P., ... Kiss, G. (2005). GasFET for the detection of reducing gases. Sensors and Actuators, B: Chemical, 111-112(SUPPL.), 106-110. https://doi.org/10.1016/j.snb.2005.06.041

GasFET for the detection of reducing gases. / Lampe, U.; Simon, E.; Pohle, R.; Fleischer, M.; Meixner, H.; Frerichs, H. P.; Lehmann, M.; Kiss, G.

In: Sensors and Actuators, B: Chemical, Vol. 111-112, No. SUPPL., 11.11.2005, p. 106-110.

Research output: Contribution to journalArticle

Lampe, U, Simon, E, Pohle, R, Fleischer, M, Meixner, H, Frerichs, HP, Lehmann, M & Kiss, G 2005, 'GasFET for the detection of reducing gases', Sensors and Actuators, B: Chemical, vol. 111-112, no. SUPPL., pp. 106-110. https://doi.org/10.1016/j.snb.2005.06.041
Lampe U, Simon E, Pohle R, Fleischer M, Meixner H, Frerichs HP et al. GasFET for the detection of reducing gases. Sensors and Actuators, B: Chemical. 2005 Nov 11;111-112(SUPPL.):106-110. https://doi.org/10.1016/j.snb.2005.06.041
Lampe, U. ; Simon, E. ; Pohle, R. ; Fleischer, M. ; Meixner, H. ; Frerichs, H. P. ; Lehmann, M. ; Kiss, G. / GasFET for the detection of reducing gases. In: Sensors and Actuators, B: Chemical. 2005 ; Vol. 111-112, No. SUPPL. pp. 106-110.
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