In some applications more than one gas source must be pumped simultaneously but individual pumps would be too expensive. Oil diffusion pumps are widely used and a range of them is constructed also in ATOMKI. The possibility of using different stages of an oil diffusion pump for pumping different gas inlets is considered. The efficiency of separation between the stages of a diffusion pump type UVD-300 was investigated and the gas penetration through the oil vapor stream was measured with a quadrupole mass spectrometer.
|Number of pages||1|
|Publication status||Published - Jan 1 1990|
|Event||Selected Proceedings of the Yugoslav-Austrian-Hungarian Fourth Joint Vacuum Conference - Portoroz, Yugosl|
Duration: Sep 20 1988 → Sep 23 1988
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces, Coatings and Films