Gas penetration between the stages of a diffusion pump

I. Berecz, S. Bohatka, I. Futo, I. Gal, G. Langer

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

In some applications more than one gas source must be pumped simultaneously but individual pumps would be too expensive. Oil diffusion pumps are widely used and a range of them is constructed also in ATOMKI. The possibility of using different stages of an oil diffusion pump for pumping different gas inlets is considered. The efficiency of separation between the stages of a diffusion pump type UVD-300 was investigated and the gas penetration through the oil vapor stream was measured with a quadrupole mass spectrometer.

Original languageEnglish
Number of pages1
JournalVacuum
Volume40
Issue number1-2
Publication statusPublished - Jan 1 1990
EventSelected Proceedings of the Yugoslav-Austrian-Hungarian Fourth Joint Vacuum Conference - Portoroz, Yugosl
Duration: Sep 20 1988Sep 23 1988

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ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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