From MEMS to the global simulation of SoCs

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper is dealing with design, simulation and test of microsystems (microelectromechanical systems, MEMS). Both existing tools and open research areas are addressed. All through the paper, similarities between the present development of MEMS and the development of microelectronics decades ago are pointed out, including the migration from point tools to Computer-Aided Design (CAD) frameworks, testing, foundries/fabless business or Intellectual Property (IP) issues. Specific aspects such as thermal simulation of microstructures and thermomechanical design at the package level. The conclusion is depicting a possible global simulation scheme integrating the needs of Systems on Chip (SoCs) multilanguage simulation together with the needs of MEMS multipurpose simulation.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsB. Courtois, S.N. Demidenko, L.Y. Lau
Pages9-20
Number of pages12
Volume4228
DOIs
Publication statusPublished - 2000
EventDesign, Modeling, and Simulation in Microelectronics - Singapure, Singapore
Duration: Nov 28 2000Nov 30 2000

Other

OtherDesign, Modeling, and Simulation in Microelectronics
CountrySingapore
CitySingapure
Period11/28/0011/30/00

Fingerprint

microelectromechanical systems
MEMS
chips
simulation
intellectual property
thermal simulation
foundries
Intellectual property
Foundries
computer aided design
microelectronics
Microelectronics
Computer aided design
microstructure
Microstructure
System-on-chip
Testing
Industry

Keywords

  • CAD
  • Manufacturing
  • Microelectromechanical systems
  • Microsystems
  • Packaging
  • Testing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Rencz, M., Székely, V., Poppe, A., & Courtois, B. (2000). From MEMS to the global simulation of SoCs. In B. Courtois, S. N. Demidenko, & L. Y. Lau (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4228, pp. 9-20) https://doi.org/10.1117/12.405418

From MEMS to the global simulation of SoCs. / Rencz, M.; Székely, V.; Poppe, A.; Courtois, B.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / B. Courtois; S.N. Demidenko; L.Y. Lau. Vol. 4228 2000. p. 9-20.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rencz, M, Székely, V, Poppe, A & Courtois, B 2000, From MEMS to the global simulation of SoCs. in B Courtois, SN Demidenko & LY Lau (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4228, pp. 9-20, Design, Modeling, and Simulation in Microelectronics, Singapure, Singapore, 11/28/00. https://doi.org/10.1117/12.405418
Rencz M, Székely V, Poppe A, Courtois B. From MEMS to the global simulation of SoCs. In Courtois B, Demidenko SN, Lau LY, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4228. 2000. p. 9-20 https://doi.org/10.1117/12.405418
Rencz, M. ; Székely, V. ; Poppe, A. ; Courtois, B. / From MEMS to the global simulation of SoCs. Proceedings of SPIE - The International Society for Optical Engineering. editor / B. Courtois ; S.N. Demidenko ; L.Y. Lau. Vol. 4228 2000. pp. 9-20
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