Fracture analysis of silicon microprobes designed for deep-brain stimulation

Z. Fekete, Z. Hajnal, G. Márton, P. Fürjes, A. Pongrácz

Research output: Contribution to journalArticle

10 Citations (Scopus)


Recent progress in microtechnology has made room for novel applications in neural stimulation as well as for extending our knowledge on several malfunction of the nerval system such as tremor, epilepsy or Parkinson's disease, which belong to the most serious medical issues in the population of developed countries. Integrated drug delivery function in neural implants can contribute advantageously to the long-term stability of the medical devices in brain tissue. In our work, a hollow silicon microprobe developed for deep-brain application is proposed and tested. The fabrication is based on a novel micromachining technique utilising conventional MEMS technology and integrating both the probe shaft and microchannel system into the same substrate. The integrated microchannels have major influence on the failure properties of the probe, therefore the feasibility of the realised microstructures for deep-brain stimulation is characterised by experimental method and by modeling focusing on the change in mechanical response to axial loading.

Original languageEnglish
Pages (from-to)160-166
Number of pages7
JournalMicroelectronic Engineering
Publication statusPublished - Mar 2013



  • Buckling
  • Deep brain stimulation
  • Drug delivery
  • Fracture test
  • Microchannel
  • Neural microprobe

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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