Fractal character of in situ heat treated metal-compound semiconductor contacts

L. Dávid, L. Dobos, B. Kovács, I. Mojzes, B. Pécz

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

The heat treatment of metallized (Au) compound semiconductors (InP) was studied by in situ scanning electron microscopy combined with mass spectrometry. Correlation was found between the change in the surface morphology and the volatile component loss caused by the material interactions taking place during the heat treatment. Our experiments proved that the surface morphology can be characterized by its fractal dimension at the maximum value of the volatile component loss. In this paper the dependence of the fractal dimension of the surface pattern on the heat treatment temperature (in a given temperature range), on the volatile component loss and on metal thickness is described. Changes of the surface morphology on the analyzed samples begin at different temperatures. The evaluated patterns were created describing contour lines of the metal islands on the surface. This island formation known as balling-up phenomenon is due to the heating up of the samples. In the case of the 10 and 30 nm Au/InP(100) samples the fractal behavior appeared nearly at the same temperature (470°C ÷ 490°C). The examined thick Au(85 nm)/InP(100) contact showed a fractal character at a lower (385°C) temperature. Although fractal dimension values could be obtained in a rather wide temperature range the surface had a real fractal character at only those temperatures where volatile component loss took place.

Original languageEnglish
Pages (from-to)321-324
Number of pages4
JournalJournal of Materials Science: Materials in Electronics
Volume17
Issue number4
DOIs
Publication statusPublished - Apr 2006

Fingerprint

Fractals
Semiconductors
metal compounds
fractals
Hot Temperature
Metals
Semiconductor materials
heat
Temperature
Fractal dimension
heat treatment
Surface morphology
Heat treatment
temperature
Islands
metals
Electron Scanning Microscopy
Heating
mass spectroscopy
Mass spectrometry

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Fractal character of in situ heat treated metal-compound semiconductor contacts. / Dávid, L.; Dobos, L.; Kovács, B.; Mojzes, I.; Pécz, B.

In: Journal of Materials Science: Materials in Electronics, Vol. 17, No. 4, 04.2006, p. 321-324.

Research output: Contribution to journalArticle

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