Flaking and wave-like structure on MeV energy high-dose 4He+ bombarded silicon

F. Pászti, Cs Hajdu, A. Manuaba, N. T. My, E. Kótai, L. Pogány, G. Mezey, M. Fried, Gy Vizkelethy, J. Gyulai

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16 Citations (Scopus)


In previous work different types of metallic glasses were irradiated under the same experimental conditions by 1 or 2 MeV 4He+ ions up to a fluence of 1018 ions/cm2. It was found that, at a critical dose, flaking occurred and on the flaked surface a wave pattern consisting of periodical elevations was observed. The appearance of this pattern was independent of the material composition and the manufacturing technology of the target as well as on the applied He+ energy provided the current was kept low to avoid beam heating effects. Surprisingly a similar pattern was also observed in the present work on the flaked surface of single crystal silicon after irradiation with MeV energy He+ ions up to the same fluence. Consequently it is suggested that this pattern is not related to amorphous structure, as was previously thought to be the most probable, but rather seems to be a more general phenomenon. Possible mechanisms of the formation are discussed.

Original languageEnglish
Pages (from-to)371-374
Number of pages4
JournalNuclear Inst. and Methods in Physics Research, B
Issue numberPART 1
Publication statusPublished - Mar 1985

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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