Fine-tuning of gas sensitivity by modification of nano-crystalline WO3 layer morphology

Máté Takács, C. Dücső, A. Pap

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Abstract The effect of WO3 nano-crystal characteristic size and layer morphology on gas sensitive properties was investigated in order to define the optimum preparation process. WO3 layers were synthesized by hydrothermal acidic precipitation method using different chemicals and reactive sputtering as reference. Micro-hotplate based conductivity type devices were fabricated and the sensitivity on NH3 up to 100 ppm was measured in the temperature range of 140-240°C. The measurements revealed that the characteristic size of the WO3 nano-crystal plays primary role, but layer morphology opens the way towards extended measuring range. The nano-rod structures operated at 220°C exhibit the best sensing characteristics in terms of sensitivity and stability over wide range of relative humidity.

Original languageEnglish
Article number18658
Pages (from-to)281-289
Number of pages9
JournalSensors and Actuators, B: Chemical
Volume221
DOIs
Publication statusPublished - Jul 8 2015

Fingerprint

Tuning
Gases
tuning
Crystalline materials
Crystals
Reactive sputtering
gases
Atmospheric humidity
sensitivity
crystals
humidity
rods
sputtering
conductivity
preparation
Temperature
temperature

Keywords

  • Gas sensing
  • Nanostructures
  • WO<inf>3</inf>

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Materials Chemistry
  • Instrumentation

Cite this

Fine-tuning of gas sensitivity by modification of nano-crystalline WO3 layer morphology. / Takács, Máté; Dücső, C.; Pap, A.

In: Sensors and Actuators, B: Chemical, Vol. 221, 18658, 08.07.2015, p. 281-289.

Research output: Contribution to journalArticle

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