Fast oxygen sensors based on sputtered strontium titanate

J. Gerblinger, H. Meixner

Research output: Contribution to journalArticle

86 Citations (Scopus)

Abstract

The preparation of oxygen sensors based on sputtered strontium titanate films is described. Like bulk materials, the thin films show p-type and n-type conductivity which depends on the oxygen partial pressure. Using mixtures of argon and oxygen at 95 °C, response times lower than 5 ms can be detected due to a change in the oxygen partial pressure. Because the temperature in an exhaust gas reaches its maximum value at lambda = 1, fast gas and lower temperature effects on the sensor signal of La-doped SrTiO3 can be separated.

Original languageEnglish
Pages (from-to)99-102
Number of pages4
JournalSensors and Actuators: B. Chemical
Volume4
Issue number1-2
DOIs
Publication statusPublished - May 1991

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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