Two different field solver tools have been developed in order to facilitate fast thermal and electro-static simulation of microsystem elements. The μS-THERMANAL program is capable of the fast steady-state and dynamic simulation of suspended multilayered microsystem structures. The 2D-SUNRED program is the first version of a general field solver based an an original method, the successive node reduction. SUNRED offers a very fast and accurate substitute of FEM programs for the solution of the Poisson equation. Steady-state and dynamic simulation examples demonstrate the usability of the novel tool.
|Number of pages||6|
|Journal||Proceedings -Design, Automation and Test in Europe, DATE|
|Publication status||Published - Dec 1 1998|
|Event||Design, Automation and Test in Europe, DATE 1998 - Paris, France|
Duration: Feb 23 1998 → Feb 26 1998
ASJC Scopus subject areas