Fast collisional capillary discharge source for soft x-ray production and applications

G. Tomassetti, L. Palladino, A. Ritucci, L. Reale, T. Limongi, S. Kukhlevsky, J. Kaiser, F. Flora, L. Mezi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report on a fast soft x-ray source consisting in a high temperature small diameter (4 mm) plasma column produced by electric discharge in a ceramic capillary. This source was developed to produce pulses of few hundred nanosecond duration for EUV lithography, x ray microscopy applications and also with the aim of developing a soft x ray amplifier. We obtained experimental results concerning the intensity and spectral analysis of the emitted x radiation pumped by a 30-40 kA, 100-200 ns, electric discharge at 1 Torr pressure in Ar gas. We refer also on the spectra obtained using CO2, as plasma medium, after the optimization of the discharge setup and electrical parameters.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsG A Kyrala, J C J Gauthier
Pages151-158
Number of pages8
Volume4504
DOIs
Publication statusPublished - 2001
EventApplications of X-Rays Generated from Lasers and Other Bright Sources II - San Diego, CA, United States
Duration: Jul 30 2001Jul 31 2001

Other

OtherApplications of X-Rays Generated from Lasers and Other Bright Sources II
CountryUnited States
CitySan Diego, CA
Period7/30/017/31/01

Fingerprint

electric discharges
Electric discharges
X rays
x ray sources
spectrum analysis
Plasmas
Extreme ultraviolet lithography
x rays
lithography
amplifiers
ceramics
microscopy
Spectrum analysis
optimization
Microscopic examination
radiation
pulses
gases
Radiation
Gases

Keywords

  • Capillary z-pinch discharges
  • Soft x-ray sources

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Tomassetti, G., Palladino, L., Ritucci, A., Reale, L., Limongi, T., Kukhlevsky, S., ... Mezi, L. (2001). Fast collisional capillary discharge source for soft x-ray production and applications. In G. A. Kyrala, & J. C. J. Gauthier (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4504, pp. 151-158) https://doi.org/10.1117/12.448460

Fast collisional capillary discharge source for soft x-ray production and applications. / Tomassetti, G.; Palladino, L.; Ritucci, A.; Reale, L.; Limongi, T.; Kukhlevsky, S.; Kaiser, J.; Flora, F.; Mezi, L.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / G A Kyrala; J C J Gauthier. Vol. 4504 2001. p. 151-158.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tomassetti, G, Palladino, L, Ritucci, A, Reale, L, Limongi, T, Kukhlevsky, S, Kaiser, J, Flora, F & Mezi, L 2001, Fast collisional capillary discharge source for soft x-ray production and applications. in GA Kyrala & JCJ Gauthier (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4504, pp. 151-158, Applications of X-Rays Generated from Lasers and Other Bright Sources II, San Diego, CA, United States, 7/30/01. https://doi.org/10.1117/12.448460
Tomassetti G, Palladino L, Ritucci A, Reale L, Limongi T, Kukhlevsky S et al. Fast collisional capillary discharge source for soft x-ray production and applications. In Kyrala GA, Gauthier JCJ, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4504. 2001. p. 151-158 https://doi.org/10.1117/12.448460
Tomassetti, G. ; Palladino, L. ; Ritucci, A. ; Reale, L. ; Limongi, T. ; Kukhlevsky, S. ; Kaiser, J. ; Flora, F. ; Mezi, L. / Fast collisional capillary discharge source for soft x-ray production and applications. Proceedings of SPIE - The International Society for Optical Engineering. editor / G A Kyrala ; J C J Gauthier. Vol. 4504 2001. pp. 151-158
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