Fast collisional capillary discharge source for soft x-ray production and applications

G. Tomassetti, L. Palladino, A. Ritucci, L. Reale, T. Limongi, S. V. Kukhlevsky, J. Kaiser, F. Flora, L. Mezi

Research output: Contribution to journalArticle

Abstract

We report on a fast soft x-ray source consisting in a high temperature small diameter (4 mm) plasma column produced by electric discharge in a ceramic capillary. This source was developed to produce pulses of few hundred nanosecond duration for EUV lithography, x ray microscopy applications and also with the aim of developing a soft x ray amplifier. We obtained experimental results concerning the intensity and spectral analysis of the emitted x radiation pumped by a 30-40 kA, 100-200 ns, electric discharge at 1 Torr pressure in Ar gas. We refer also on the spectra obtained using CO2, as plasma medium, after the optimization of the discharge setup and electrical parameters.

Original languageEnglish
Pages (from-to)151-158
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4504
DOIs
Publication statusPublished - Jan 1 2001

Keywords

  • Capillary z-pinch discharges
  • Soft x-ray sources

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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