Fabrication of reverse symmetry polymer waveguide sensor chips on nanoporous substrates using dip-floating

R. Horváth, Henrik C. Pedersen, Nina Skivesen, Christer Svanberg, Niels B. Larsen

Research output: Contribution to journalArticle

39 Citations (Scopus)

Abstract

Reverse symmetry waveguide biosensors employ substrates with a refractive index less than the analyzed aqueous cover sample (1.33). This design offers higher sensitivities for detecting micron scale biological objects such as bacteria and living cells. In the present paper, the fabrication details of reverse symmetry polymer waveguide sensors using nanoporous silica substrates with refractive index 1.2 are presented. Using nanoporous substrates the direct spin-coating deposition of polymer films is not feasible, since the solvent used to dissolve the polymer fills up the nanopores leading to a substrate RI more than 1.33. Instead, a technique - referred to as dip-floating - was applied to create freely floating 150-nm thick polymer films on the surface of water. The films were transferred to the nanoporous substrates simply by pressing the substrates through the air-floating film-water interface. A heat molding technique using a PDMS grating was used to create integrated gratings on the polymer films for light coupling.

Original languageEnglish
Pages (from-to)1260-1264
Number of pages5
JournalJournal of Micromechanics and Microengineering
Volume15
Issue number6
DOIs
Publication statusPublished - Jun 1 2005

Fingerprint

floating
Polymers
Waveguides
chips
waveguides
Fabrication
fabrication
sensors
Sensors
polymers
symmetry
Substrates
Polymer films
Refractive index
gratings
refractivity
Nanopores
Water
Spin coating
pressing

ASJC Scopus subject areas

  • Instrumentation
  • Materials Science(all)
  • Mechanics of Materials
  • Computational Mechanics

Cite this

Fabrication of reverse symmetry polymer waveguide sensor chips on nanoporous substrates using dip-floating. / Horváth, R.; Pedersen, Henrik C.; Skivesen, Nina; Svanberg, Christer; Larsen, Niels B.

In: Journal of Micromechanics and Microengineering, Vol. 15, No. 6, 01.06.2005, p. 1260-1264.

Research output: Contribution to journalArticle

Horváth, R. ; Pedersen, Henrik C. ; Skivesen, Nina ; Svanberg, Christer ; Larsen, Niels B. / Fabrication of reverse symmetry polymer waveguide sensor chips on nanoporous substrates using dip-floating. In: Journal of Micromechanics and Microengineering. 2005 ; Vol. 15, No. 6. pp. 1260-1264.
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