Fabrication of polarizer by metal evaporation of fused silica surface relief gratings

Bálint Kiss, Roland Flender, Judit Kopniczky, Ferenc Ujhelyi, Csaba Vass

Research output: Contribution to journalArticle

Abstract

Our aim was to produce metal-wire grating polarizers by a simple two-step method. First, fused silica surface relief gratings were generated by two-beam interferometric laser-induced backside wet etching (TWIN-LIBWE) technique. The grating period was varied from 150 nm to 860 nm (p=150, 280, 460, 860 nm) by the changing of the incident angle of interfering beams. In the second step the gratings were selectively evaporated by thin silver (Ag) film using near grazing incidence (80°) ar-rangement to produce narrow metal wires. The thickness of metal film was 30±5 nm. The morphol-ogy of fabricated metal-wire structures were studied by scanning electron microscopy. The polariz-ers were tested in infrared wavelength range (λ=1532 nm). According to our measurements, the po-larisation contrast of 280 nm period structures was 1:10 for TE:TM transmitted modes. In this case the filling factor of metallic stripes are close to 0.7.

Original languageEnglish
Pages (from-to)53-58
Number of pages6
JournalJournal of Laser Micro Nanoengineering
Volume10
Issue number1
DOIs
Publication statusPublished - 2015

Keywords

  • Metal wire grating
  • Periodic structure
  • Polarizer

ASJC Scopus subject areas

  • Instrumentation
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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