Fabrication of low loss channel waveguide in tungsten-tellurite glass by 11 MeV carbon ion microbeam for telecom C band

István Bányász, Edit Szilágyi, Istvan Rajta, Gyula U.L. Nagy, Stefano Pelli, Gualtiero Nunzi Conti, Simone Berneschi, Vladimir Havránek, Vaclav Vosecek, Norbert Nagy, Zoltan Szabó, Miklos Veres, Adolfo Speghini

Research output: Contribution to journalArticle

Abstract

Channel waveguides were directly written in Er: TeO2W2O3 glass using 11 MeV C4+ ion microbeam with fluences in the range of 1·1014–5·1016 ion/cm2. The channel waveguides supported a single guided mode at λ = 1540 nm. Propagation losses of the as-irradiated channel waveguides were around 14 dB/cm. A 30-min thermal annealing at 150 °C in air reduced propagation losses at λ = 1400 nm to 1.5 dB/cm. This method produced channel waveguides with confinement and propagation losses comparable to or better than other current methods, such as MeV energy focused proton or helium ion beam writing.

Original languageEnglish
Article number100035
JournalOptical Materials: X
Volume4
DOIs
Publication statusPublished - Dec 2019

Keywords

  • Channel waveguides
  • Integrated optics
  • Microstructure fabrication
  • Optical design and fabrication
  • Rare earth doped materials

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Computer Science(all)
  • Atomic and Molecular Physics, and Optics
  • Spectroscopy
  • Physical and Theoretical Chemistry
  • Organic Chemistry
  • Inorganic Chemistry
  • Electrical and Electronic Engineering

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  • Cite this

    Bányász, I., Szilágyi, E., Rajta, I., Nagy, G. U. L., Pelli, S., Nunzi Conti, G., Berneschi, S., Havránek, V., Vosecek, V., Nagy, N., Szabó, Z., Veres, M., & Speghini, A. (2019). Fabrication of low loss channel waveguide in tungsten-tellurite glass by 11 MeV carbon ion microbeam for telecom C band. Optical Materials: X, 4, [100035]. https://doi.org/10.1016/j.omx.2019.100035