Fabrication of channel waveguides in Er3+-doped tellurite glass via N+ ion implantation

N. Q. Khánh, S. Berneschi, I. Bányász, M. Brenci, M. Fried, G. Nunzi Conti, F. Pászti, S. Pelli, G. C. Righini, A. Watterich

Research output: Contribution to journalArticle

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Abstract

Er3+-doped tellurite glasses are of great interest for the fabrication of active integrated optical circuits because of their unique properties in terms of bandwidth and rare-earth solubility. Multimode channel waveguides in a glass of this family, namely, a sodium-tungsten-tellurite glass, have been realized with high-energy ion irradiation, where the ion beam size in one dimension was reduced to a few tens of micrometers by a silicon mask. This approach makes possible the fast fabrication of waveguides with high aspect ratio (∼103). The 24 μm wide and 10 mm long waveguide stripes achieved by 1.5 MeV N+ irradiation with fluences between 5 × 1015 and 4.0 × 1016 ions/cm2 were studied using interference phase contrast microscopy and surface profilometry. The waveguiding effect was investigated by the end-fire coupling technique. Multimode light propagation has indeed been observed in these channels, confirming the effectiveness of this method. Dark-line spectroscopy revealed that light propagated in the channel via the optical barrier formed by the N+ implantation.

Original languageEnglish
Pages (from-to)2327-2330
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume267
Issue number12-13
DOIs
Publication statusPublished - Jun 15 2009

Fingerprint

Ion implantation
ion implantation
Waveguides
waveguides
Fabrication
Glass
fabrication
glass
Light propagation
Profilometry
phase contrast
Ion bombardment
high aspect ratio
ion irradiation
Ion beams
Rare earths
Tungsten
micrometers
Aspect ratio
Masks

Keywords

  • Channel waveguides
  • Dark-line spectroscopy
  • Er-doped glasses
  • Interference phase contrast microscopy
  • Ion beam irradiation
  • Surface profilometry
  • Tellurite glass

ASJC Scopus subject areas

  • Instrumentation
  • Nuclear and High Energy Physics

Cite this

Fabrication of channel waveguides in Er3+-doped tellurite glass via N+ ion implantation. / Khánh, N. Q.; Berneschi, S.; Bányász, I.; Brenci, M.; Fried, M.; Nunzi Conti, G.; Pászti, F.; Pelli, S.; Righini, G. C.; Watterich, A.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 267, No. 12-13, 15.06.2009, p. 2327-2330.

Research output: Contribution to journalArticle

Khánh, N. Q. ; Berneschi, S. ; Bányász, I. ; Brenci, M. ; Fried, M. ; Nunzi Conti, G. ; Pászti, F. ; Pelli, S. ; Righini, G. C. ; Watterich, A. / Fabrication of channel waveguides in Er3+-doped tellurite glass via N+ ion implantation. In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2009 ; Vol. 267, No. 12-13. pp. 2327-2330.
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