Fabrication of barrier-type slab waveguides in Er 3+-doped tellurite glass by single and double energy MeV N + ion implantation

I. Bányász, Z. Zolnai, S. Pelli, S. Berneschi, G. Nunzi-Conti, M. Fried, T. Lohner, P. Petrik, M. Brenci, G. C. Righini

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Ion implantation proved to be a universal technique for producing waveguides in most optical materials. Tellurite glasses are good hosts of rare-earth elements for the development of fibre and integrated optical amplifiers and lasers covering all the main telecommunication bands. Er 3+- doped tellurite glasses are good candidates for the fabrication of broadband amplifiers in wavelength division multiplexing around 1.55 μm, as they exhibit large stimulated cross sections and broad emission bandwidth. Fabrication of channel waveguides in such a material via N+ ion implantation was reported recently. Parameters of waveguide fabrication in an Er-doped tungsten-tellurite glass via implantation of N + ions were optimized. First single-energy implantation at 3.5 MeV with fluences between 1·10 16 and 8·10 16 ions/cm2 was applied. Waveguide operation up to 1.5 μm was observed. Then double-energy implantations at a fixed upper energy of 3.5 MeV and lower energies between 2.5 and 3.0 MeV were performed to suppress leaky modes by increasing barrier width. Improvement of waveguide characteristics was found by m-line spectroscopy and spectroscopic ellipsometry.

Original languageEnglish
Title of host publicationIntegrated Optics
Subtitle of host publicationDevices, Materials, and Technologies XVI
DOIs
Publication statusPublished - Apr 17 2012
EventIntegrated Optics: Devices, Materials, and Technologies XVI - San Francisco, CA, United States
Duration: Jan 23 2012Jan 25 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8264
ISSN (Print)0277-786X

Other

OtherIntegrated Optics: Devices, Materials, and Technologies XVI
CountryUnited States
CitySan Francisco, CA
Period1/23/121/25/12

Keywords

  • Er-doped tungsten-tellurite glass
  • ion implantation
  • m-line spectroscopy
  • planar optical waveguides
  • spectroscopic ellipsometry
  • two-energy irradiation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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    Bányász, I., Zolnai, Z., Pelli, S., Berneschi, S., Nunzi-Conti, G., Fried, M., Lohner, T., Petrik, P., Brenci, M., & Righini, G. C. (2012). Fabrication of barrier-type slab waveguides in Er 3+-doped tellurite glass by single and double energy MeV N + ion implantation. In Integrated Optics: Devices, Materials, and Technologies XVI [826406] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8264). https://doi.org/10.1117/12.910706