Fabrication of all-polymer freestanding waveguides

R. Horváth, Lars R. Lindvold, Niels B. Larsen

Research output: Contribution to journalArticle

40 Citations (Scopus)

Abstract

Optical waveguides are used in a wide range of scientific and technological applications. In this paper we focus on the application of waveguides as biosensors with the specific aim of implementing a novel waveguide design for a sensor with improved sensitivity to sub-micron as well as micron-scale analyte entities. The realization of this goal requires ways of fabricating freely suspended polymer thin films of well-defined thickness and having a nanometer scale deep optical grating in their surface. We demonstrate several easy pathways for making such a waveguide module through the combination of advanced polymer handling methodologies based on soft lithography approaches. The resulting waveguide modules are capable of guiding light coupled into the waveguide through its integrated grating coupler. We believe that the presented fabrication methodologies may be of general utility for microfabrication in polymers and that the improved waveguide structures may also find wider use in integrated optics.

Original languageEnglish
Pages (from-to)419-424
Number of pages6
JournalJournal of Micromechanics and Microengineering
Volume13
Issue number3
DOIs
Publication statusPublished - May 2003

Fingerprint

Polymers
Waveguides
waveguides
Fabrication
fabrication
polymers
modules
gratings
methodology
Integrated optics
Microfabrication
integrated optics
Diffraction gratings
Optical waveguides
bioinstrumentation
Polymer films
Biosensors
optical waveguides
Lithography
couplers

ASJC Scopus subject areas

  • Computational Mechanics
  • Mechanics of Materials
  • Materials Science(all)
  • Instrumentation

Cite this

Fabrication of all-polymer freestanding waveguides. / Horváth, R.; Lindvold, Lars R.; Larsen, Niels B.

In: Journal of Micromechanics and Microengineering, Vol. 13, No. 3, 05.2003, p. 419-424.

Research output: Contribution to journalArticle

Horváth, R. ; Lindvold, Lars R. ; Larsen, Niels B. / Fabrication of all-polymer freestanding waveguides. In: Journal of Micromechanics and Microengineering. 2003 ; Vol. 13, No. 3. pp. 419-424.
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