Fabrication of a microreactor by proton beam writing technique

R. Huszánk, S. Z. Szilasi, K. Vad, I. Rajta

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Microreactors are innovative and promising tools in technology nowadays because of their advantages compared to the conventional-scale reactors. These advantages include vast improvements in surface to volume ratio, energy efficiency, reaction speed and yield and increased control of reaction conditions, to name a few examples. The high resolution capability of the micromachining technique utilizing accelerated ion beams in the fabrication technology of microreactors has not yet been taken advantage of. In this work we present the design of a prototype micro-electrochemical cell of 1.5 μL volume (2.5 × 2.5 × 0.240 mm) created with a 3 MeV proton microbeam. The cell can be separated into two half-cells with a suitable membrane applicable to galvanic or fuel cells as well. We deposited gold electrodes on both of the half-cells. The operability of the device was demonstrated by electric current flow between the two electrodes in this micro-electrochemical cell containing a simple electrolyte solution. We used a polycapillary film to separate the two half-cells, hindering the mixing of the anolyte and catholyte solutions. As a result of the minimal mixing caused by the polycapillary film, this cell design can be suitable for electro-synthesis. Due to the high resolution of proton beam writing, it is planned to reduce the dimensions of this kind of microreactor.

Original languageEnglish
Pages (from-to)2299-2301
Number of pages3
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume267
Issue number12-13
DOIs
Publication statusPublished - Jun 15 2009

Fingerprint

Proton beams
Electrochemical cells
proton beams
Fabrication
Electrodes
fabrication
Micromachining
Electric currents
cells
Ion beams
electrochemical cells
Energy efficiency
Fuel cells
Protons
Gold
Electrolytes
Membranes
electrolytic cells
electrochemical synthesis
electrodes

Keywords

  • Electrochemical sensor application
  • Fuel cell
  • Microreactor
  • PBW
  • Proton beam micromachining

ASJC Scopus subject areas

  • Instrumentation
  • Nuclear and High Energy Physics

Cite this

Fabrication of a microreactor by proton beam writing technique. / Huszánk, R.; Szilasi, S. Z.; Vad, K.; Rajta, I.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 267, No. 12-13, 15.06.2009, p. 2299-2301.

Research output: Contribution to journalArticle

@article{bec96c8918214f8b9fa49b5d7102e228,
title = "Fabrication of a microreactor by proton beam writing technique",
abstract = "Microreactors are innovative and promising tools in technology nowadays because of their advantages compared to the conventional-scale reactors. These advantages include vast improvements in surface to volume ratio, energy efficiency, reaction speed and yield and increased control of reaction conditions, to name a few examples. The high resolution capability of the micromachining technique utilizing accelerated ion beams in the fabrication technology of microreactors has not yet been taken advantage of. In this work we present the design of a prototype micro-electrochemical cell of 1.5 μL volume (2.5 × 2.5 × 0.240 mm) created with a 3 MeV proton microbeam. The cell can be separated into two half-cells with a suitable membrane applicable to galvanic or fuel cells as well. We deposited gold electrodes on both of the half-cells. The operability of the device was demonstrated by electric current flow between the two electrodes in this micro-electrochemical cell containing a simple electrolyte solution. We used a polycapillary film to separate the two half-cells, hindering the mixing of the anolyte and catholyte solutions. As a result of the minimal mixing caused by the polycapillary film, this cell design can be suitable for electro-synthesis. Due to the high resolution of proton beam writing, it is planned to reduce the dimensions of this kind of microreactor.",
keywords = "Electrochemical sensor application, Fuel cell, Microreactor, PBW, Proton beam micromachining",
author = "R. Husz{\'a}nk and Szilasi, {S. Z.} and K. Vad and I. Rajta",
year = "2009",
month = "6",
day = "15",
doi = "10.1016/j.nimb.2009.03.046",
language = "English",
volume = "267",
pages = "2299--2301",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",
number = "12-13",

}

TY - JOUR

T1 - Fabrication of a microreactor by proton beam writing technique

AU - Huszánk, R.

AU - Szilasi, S. Z.

AU - Vad, K.

AU - Rajta, I.

PY - 2009/6/15

Y1 - 2009/6/15

N2 - Microreactors are innovative and promising tools in technology nowadays because of their advantages compared to the conventional-scale reactors. These advantages include vast improvements in surface to volume ratio, energy efficiency, reaction speed and yield and increased control of reaction conditions, to name a few examples. The high resolution capability of the micromachining technique utilizing accelerated ion beams in the fabrication technology of microreactors has not yet been taken advantage of. In this work we present the design of a prototype micro-electrochemical cell of 1.5 μL volume (2.5 × 2.5 × 0.240 mm) created with a 3 MeV proton microbeam. The cell can be separated into two half-cells with a suitable membrane applicable to galvanic or fuel cells as well. We deposited gold electrodes on both of the half-cells. The operability of the device was demonstrated by electric current flow between the two electrodes in this micro-electrochemical cell containing a simple electrolyte solution. We used a polycapillary film to separate the two half-cells, hindering the mixing of the anolyte and catholyte solutions. As a result of the minimal mixing caused by the polycapillary film, this cell design can be suitable for electro-synthesis. Due to the high resolution of proton beam writing, it is planned to reduce the dimensions of this kind of microreactor.

AB - Microreactors are innovative and promising tools in technology nowadays because of their advantages compared to the conventional-scale reactors. These advantages include vast improvements in surface to volume ratio, energy efficiency, reaction speed and yield and increased control of reaction conditions, to name a few examples. The high resolution capability of the micromachining technique utilizing accelerated ion beams in the fabrication technology of microreactors has not yet been taken advantage of. In this work we present the design of a prototype micro-electrochemical cell of 1.5 μL volume (2.5 × 2.5 × 0.240 mm) created with a 3 MeV proton microbeam. The cell can be separated into two half-cells with a suitable membrane applicable to galvanic or fuel cells as well. We deposited gold electrodes on both of the half-cells. The operability of the device was demonstrated by electric current flow between the two electrodes in this micro-electrochemical cell containing a simple electrolyte solution. We used a polycapillary film to separate the two half-cells, hindering the mixing of the anolyte and catholyte solutions. As a result of the minimal mixing caused by the polycapillary film, this cell design can be suitable for electro-synthesis. Due to the high resolution of proton beam writing, it is planned to reduce the dimensions of this kind of microreactor.

KW - Electrochemical sensor application

KW - Fuel cell

KW - Microreactor

KW - PBW

KW - Proton beam micromachining

UR - http://www.scopus.com/inward/record.url?scp=66349116394&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=66349116394&partnerID=8YFLogxK

U2 - 10.1016/j.nimb.2009.03.046

DO - 10.1016/j.nimb.2009.03.046

M3 - Article

AN - SCOPUS:66349116394

VL - 267

SP - 2299

EP - 2301

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

IS - 12-13

ER -