Explosion-proof monitoring of hydrocarbons by mechanically stabilised, integrable calorimetric microsensors

C. Dücső, M. Ádám, P. Fürjes, M. Hirschfelder, S. Kulinyi, I. Bársony

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

Safe detection of combustible gases is demonstrated by a new type of integrated micropellistor and heat conductivity sensor. The basic element in both types of calorimetric devices is a thermally isolated microhotplate with a Pt heater, embedded in non-stoichiometric silicon-nitride. The pellistors are formed from a pair of an active and a passive resistor element in a Wheatstone-bridge arrangement, and heated up to 200-600 °C in the environment to be monitored with a power dissipation of 20-60 mW. A novel, proprietary one-side porous silicon micromachining process was developed for the formation of the air gap around the devices, offering a thin single crystalline Si support for the membrane. Patent pending. Owing to the better mechanical stability obtained, the relatively large mass of porous substance, containing the finely dispersed catalysts of Pt, Pd or Rh on one hand, and for forming the chemically inert reference device on the other hand, can be deposited on top of the microheaters without jeopardising the heater integrity. The sensors, utilising the heat conductivity principle, are composed of a pair of chemically passive elements, having different heat exchange properties due their dissimilar surface. Explosion-proof detection of hydrocarbons was demonstrated by measuring concentration levels between the lower and upper explosion limits (LEL, UEL) with no protective encapsulation, whatsoever.

Original languageEnglish
Pages (from-to)189-194
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume95
Issue number1-3
DOIs
Publication statusPublished - Oct 15 2003

Fingerprint

Microsensors
Hydrocarbons
Explosions
explosions
Thermal conductivity
hydrocarbons
heaters
heat
Monitoring
Mechanical stability
Porous silicon
Sensors
Micromachining
Silicon nitride
Encapsulation
Resistors
Wheatstone bridges
Energy dissipation
conductivity
patents

Keywords

  • Calorimetric gas sensing
  • Explosive gas detection
  • Microhotplate
  • Olfactory imaging
  • Porous Si micromachining

ASJC Scopus subject areas

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

Cite this

Explosion-proof monitoring of hydrocarbons by mechanically stabilised, integrable calorimetric microsensors. / Dücső, C.; Ádám, M.; Fürjes, P.; Hirschfelder, M.; Kulinyi, S.; Bársony, I.

In: Sensors and Actuators, B: Chemical, Vol. 95, No. 1-3, 15.10.2003, p. 189-194.

Research output: Contribution to journalArticle

@article{bf76f5cb50aa4b14a3f8f6c12a267c63,
title = "Explosion-proof monitoring of hydrocarbons by mechanically stabilised, integrable calorimetric microsensors",
abstract = "Safe detection of combustible gases is demonstrated by a new type of integrated micropellistor and heat conductivity sensor. The basic element in both types of calorimetric devices is a thermally isolated microhotplate with a Pt heater, embedded in non-stoichiometric silicon-nitride. The pellistors are formed from a pair of an active and a passive resistor element in a Wheatstone-bridge arrangement, and heated up to 200-600 °C in the environment to be monitored with a power dissipation of 20-60 mW. A novel, proprietary one-side porous silicon micromachining process was developed for the formation of the air gap around the devices, offering a thin single crystalline Si support for the membrane. Patent pending. Owing to the better mechanical stability obtained, the relatively large mass of porous substance, containing the finely dispersed catalysts of Pt, Pd or Rh on one hand, and for forming the chemically inert reference device on the other hand, can be deposited on top of the microheaters without jeopardising the heater integrity. The sensors, utilising the heat conductivity principle, are composed of a pair of chemically passive elements, having different heat exchange properties due their dissimilar surface. Explosion-proof detection of hydrocarbons was demonstrated by measuring concentration levels between the lower and upper explosion limits (LEL, UEL) with no protective encapsulation, whatsoever.",
keywords = "Calorimetric gas sensing, Explosive gas detection, Microhotplate, Olfactory imaging, Porous Si micromachining",
author = "C. D{\"u}cső and M. {\'A}d{\'a}m and P. F{\"u}rjes and M. Hirschfelder and S. Kulinyi and I. B{\'a}rsony",
year = "2003",
month = "10",
day = "15",
doi = "10.1016/S0925-4005(03)00415-5",
language = "English",
volume = "95",
pages = "189--194",
journal = "Sensors and Actuators, B: Chemical",
issn = "0925-4005",
publisher = "Elsevier",
number = "1-3",

}

TY - JOUR

T1 - Explosion-proof monitoring of hydrocarbons by mechanically stabilised, integrable calorimetric microsensors

AU - Dücső, C.

AU - Ádám, M.

AU - Fürjes, P.

AU - Hirschfelder, M.

AU - Kulinyi, S.

AU - Bársony, I.

PY - 2003/10/15

Y1 - 2003/10/15

N2 - Safe detection of combustible gases is demonstrated by a new type of integrated micropellistor and heat conductivity sensor. The basic element in both types of calorimetric devices is a thermally isolated microhotplate with a Pt heater, embedded in non-stoichiometric silicon-nitride. The pellistors are formed from a pair of an active and a passive resistor element in a Wheatstone-bridge arrangement, and heated up to 200-600 °C in the environment to be monitored with a power dissipation of 20-60 mW. A novel, proprietary one-side porous silicon micromachining process was developed for the formation of the air gap around the devices, offering a thin single crystalline Si support for the membrane. Patent pending. Owing to the better mechanical stability obtained, the relatively large mass of porous substance, containing the finely dispersed catalysts of Pt, Pd or Rh on one hand, and for forming the chemically inert reference device on the other hand, can be deposited on top of the microheaters without jeopardising the heater integrity. The sensors, utilising the heat conductivity principle, are composed of a pair of chemically passive elements, having different heat exchange properties due their dissimilar surface. Explosion-proof detection of hydrocarbons was demonstrated by measuring concentration levels between the lower and upper explosion limits (LEL, UEL) with no protective encapsulation, whatsoever.

AB - Safe detection of combustible gases is demonstrated by a new type of integrated micropellistor and heat conductivity sensor. The basic element in both types of calorimetric devices is a thermally isolated microhotplate with a Pt heater, embedded in non-stoichiometric silicon-nitride. The pellistors are formed from a pair of an active and a passive resistor element in a Wheatstone-bridge arrangement, and heated up to 200-600 °C in the environment to be monitored with a power dissipation of 20-60 mW. A novel, proprietary one-side porous silicon micromachining process was developed for the formation of the air gap around the devices, offering a thin single crystalline Si support for the membrane. Patent pending. Owing to the better mechanical stability obtained, the relatively large mass of porous substance, containing the finely dispersed catalysts of Pt, Pd or Rh on one hand, and for forming the chemically inert reference device on the other hand, can be deposited on top of the microheaters without jeopardising the heater integrity. The sensors, utilising the heat conductivity principle, are composed of a pair of chemically passive elements, having different heat exchange properties due their dissimilar surface. Explosion-proof detection of hydrocarbons was demonstrated by measuring concentration levels between the lower and upper explosion limits (LEL, UEL) with no protective encapsulation, whatsoever.

KW - Calorimetric gas sensing

KW - Explosive gas detection

KW - Microhotplate

KW - Olfactory imaging

KW - Porous Si micromachining

UR - http://www.scopus.com/inward/record.url?scp=0042735113&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0042735113&partnerID=8YFLogxK

U2 - 10.1016/S0925-4005(03)00415-5

DO - 10.1016/S0925-4005(03)00415-5

M3 - Article

VL - 95

SP - 189

EP - 194

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

SN - 0925-4005

IS - 1-3

ER -