Experimental verification of the stress model for the wrinkling of ion-implanted layers

M. Fried, L. Pogány, A. Manuaba, F. Pszti, C. Hajdú

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Experiments were conducted to verify the stress model for the wrinkling of ion-implanted layers [C. Hajdu et al., preceding paper, Phys. Rev. B 41, 3920 (1990)]. The model is based on the elastic instability of the implanted layer, and in its simplified form it predicts a wavelength of wrinkling () equal to 4.3 times the thickness () of the implanted-atom distribution. This is in reasonable agreement with earlier experiments performed with various parameters. A more realistic evaluation of the model using a fitting parameter (which carries the material dependence) predicts =c3/4. As further proof of the model, experiments were performed with all parameters kept the same as in control samples except for a larger ion distribution width using our quasisimultaneous multiple-energy-implantation method. The results are in full accord with the predictions of the model; i.e., a sixfold increase in wavelength is observed, and the material dependence is pointed out.

Original languageEnglish
Pages (from-to)3923-3927
Number of pages5
JournalPhysical Review B
Volume41
Issue number7
DOIs
Publication statusPublished - 1990

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wrinkling
Ions
ions
Wavelength
ion distribution
Experiments
Heavy ions
wavelengths
implantation
Atoms
evaluation
predictions
atoms

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Experimental verification of the stress model for the wrinkling of ion-implanted layers. / Fried, M.; Pogány, L.; Manuaba, A.; Pszti, F.; Hajdú, C.

In: Physical Review B, Vol. 41, No. 7, 1990, p. 3923-3927.

Research output: Contribution to journalArticle

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