Experimental study on droplet generation during excimer laser ablation of polyethylene glycol 1000

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Abstract

Droplet generation during laser ablation is important from the point of view of the quality of films deposited by pulsed laser deposition. Dependence of the emitted droplet properties and distribution on the state of matter, viscosity and fluence was investigated experimentally. Polyethylene glycol (PEG) 1000 having relatively low melting point (37 °C) was used in our experiments. By variation of target temperature between 23 and 80° the amount and dimensions of emitted droplets were studied. An ArF excimer laser was used for irradiation, the applied fluence was varied in the range of 0.37-2.66 J/cm2. The droplets were caught onto a quartz plate placed above the target. During the transition from solid to liquid state of PEG 1000 the number and the total volume of droplets emitted during ablation were drastically decreased, reaching a minimum at 40 °C. Further heating of the molten target resulted in increment in the amount of emitted droplets. At 70 °C target temperature the maximum quantity of droplets were deposited at a fluence of 1.28 J/cm2. It was found that with increasing viscosity the number and total volume of droplets decrease significantly. Deposition with the smallest amount of droplets is reached, when using molten targets near to melting point with a high viscosity.

Original languageEnglish
Pages (from-to)146-149
Number of pages4
JournalApplied Surface Science
Volume168
Issue number1-4
DOIs
Publication statusPublished - Dec 15 2000

Fingerprint

Excimer lasers
Laser ablation
excimer lasers
Polyethylene glycols
laser ablation
glycols
polyethylenes
fluence
viscosity
melting points
Viscosity
Melting point
Molten materials
ablation
pulsed laser deposition
quartz
polyethylene glycol 1000
Quartz
irradiation
heating

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

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title = "Experimental study on droplet generation during excimer laser ablation of polyethylene glycol 1000",
abstract = "Droplet generation during laser ablation is important from the point of view of the quality of films deposited by pulsed laser deposition. Dependence of the emitted droplet properties and distribution on the state of matter, viscosity and fluence was investigated experimentally. Polyethylene glycol (PEG) 1000 having relatively low melting point (37 °C) was used in our experiments. By variation of target temperature between 23 and 80° the amount and dimensions of emitted droplets were studied. An ArF excimer laser was used for irradiation, the applied fluence was varied in the range of 0.37-2.66 J/cm2. The droplets were caught onto a quartz plate placed above the target. During the transition from solid to liquid state of PEG 1000 the number and the total volume of droplets emitted during ablation were drastically decreased, reaching a minimum at 40 °C. Further heating of the molten target resulted in increment in the amount of emitted droplets. At 70 °C target temperature the maximum quantity of droplets were deposited at a fluence of 1.28 J/cm2. It was found that with increasing viscosity the number and total volume of droplets decrease significantly. Deposition with the smallest amount of droplets is reached, when using molten targets near to melting point with a high viscosity.",
author = "T. Smausz and B. Hopp and C. Vass and Z. T{\'o}th",
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T1 - Experimental study on droplet generation during excimer laser ablation of polyethylene glycol 1000

AU - Smausz, T.

AU - Hopp, B.

AU - Vass, C.

AU - Tóth, Z.

PY - 2000/12/15

Y1 - 2000/12/15

N2 - Droplet generation during laser ablation is important from the point of view of the quality of films deposited by pulsed laser deposition. Dependence of the emitted droplet properties and distribution on the state of matter, viscosity and fluence was investigated experimentally. Polyethylene glycol (PEG) 1000 having relatively low melting point (37 °C) was used in our experiments. By variation of target temperature between 23 and 80° the amount and dimensions of emitted droplets were studied. An ArF excimer laser was used for irradiation, the applied fluence was varied in the range of 0.37-2.66 J/cm2. The droplets were caught onto a quartz plate placed above the target. During the transition from solid to liquid state of PEG 1000 the number and the total volume of droplets emitted during ablation were drastically decreased, reaching a minimum at 40 °C. Further heating of the molten target resulted in increment in the amount of emitted droplets. At 70 °C target temperature the maximum quantity of droplets were deposited at a fluence of 1.28 J/cm2. It was found that with increasing viscosity the number and total volume of droplets decrease significantly. Deposition with the smallest amount of droplets is reached, when using molten targets near to melting point with a high viscosity.

AB - Droplet generation during laser ablation is important from the point of view of the quality of films deposited by pulsed laser deposition. Dependence of the emitted droplet properties and distribution on the state of matter, viscosity and fluence was investigated experimentally. Polyethylene glycol (PEG) 1000 having relatively low melting point (37 °C) was used in our experiments. By variation of target temperature between 23 and 80° the amount and dimensions of emitted droplets were studied. An ArF excimer laser was used for irradiation, the applied fluence was varied in the range of 0.37-2.66 J/cm2. The droplets were caught onto a quartz plate placed above the target. During the transition from solid to liquid state of PEG 1000 the number and the total volume of droplets emitted during ablation were drastically decreased, reaching a minimum at 40 °C. Further heating of the molten target resulted in increment in the amount of emitted droplets. At 70 °C target temperature the maximum quantity of droplets were deposited at a fluence of 1.28 J/cm2. It was found that with increasing viscosity the number and total volume of droplets decrease significantly. Deposition with the smallest amount of droplets is reached, when using molten targets near to melting point with a high viscosity.

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