Experimental study of low energy ion mixing

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

We have measured the energy dependence of the depth resolution in AES depth profiling experiments using glancing ion incidence angle and specimen rotation during ion sputtering. It was found that under these conditions the depth resolution did not depend on the removed layer thickness, but rather on the ion energy. An ion energy change was immediately followed by a change in the depth resolution. Based on this observation we concluded that, in the cases of TaNi and MoSi multilayer systems, ion mixing is the most important contribution to depth resolution in the energy range of 4-10 and 3-10 keV, respectively. Hence, by measuring depth resolution, we can obtain data on ion mixing.

Original languageEnglish
Pages (from-to)333-335
Number of pages3
JournalVacuum
Volume45
Issue number2-3
DOIs
Publication statusPublished - 1994

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Ions
ions
energy
Depth profiling
Sputtering
Multilayers
incidence
sputtering
Experiments

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Experimental study of low energy ion mixing. / Barna, A.; Konkol, A.; Sulyok, A.; Menyhárd, M.

In: Vacuum, Vol. 45, No. 2-3, 1994, p. 333-335.

Research output: Contribution to journalArticle

Barna, A. ; Konkol, A. ; Sulyok, A. ; Menyhárd, M. / Experimental study of low energy ion mixing. In: Vacuum. 1994 ; Vol. 45, No. 2-3. pp. 333-335.
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