Experimental Observation and Computational Analysis of Striations in Electronegative Capacitively Coupled Radio-Frequency Plasmas

Yong Xin Liu, Edmund Schüngel, Ihor Korolov, Zoltán Donkó, You Nian Wang, Julian Schulze

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

Self-organized spatial structures in the light emission from the ion-ion capacitive rf plasma of a strongly electronegative gas (CF4) are observed experimentally for the first time. Their formation is analyzed and understood based on particle-based kinetic simulations. These "striations" are found to be generated by the resonance between the driving radio frequency and the eigenfrequency of the ion-ion plasma (derived from an analytical model) that establishes a modulation of the electric field, the ion densities, as well as the energy gain and loss processes of electrons in the plasma. The growth of the instability is followed by the numerical simulations.

Original languageEnglish
Article number255002
JournalPhysical review letters
Volume116
Issue number25
DOIs
Publication statusPublished - Jun 21 2016

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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