Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases

Z. Donkó, A. Derzsi, I. Korolov, P. Hartmann, S. Brandt, J. Schulze, B. Berger, M. Koepke, B. Bruneau, E. Johnson, T. Lafleur, J. P. Booth, A. R. Gibson, D. O'Connell, T. Gans

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We discuss the origin of uncertainties in the results of numerical simulations of low-temperature plasma sources, focusing on capacitively coupled plasmas. These sources can be operated in various gases/gas mixtures, over a wide domain of excitation frequency, voltage, and gas pressure. At low pressures, the non-equilibrium character of the charged particle transport prevails and particle-based simulations become the primary tools for their numerical description. The particle-in-cell method, complemented with Monte Carlo type description of collision processes, is a well-established approach for this purpose. Codes based on this technique have been developed by several authors/groups, and have been benchmarked with each other in some cases. Such benchmarking demonstrates the correctness of the codes, but the underlying physical model remains unvalidated. This is a key point, as this model should ideally account for all important plasma chemical reactions as well as for the plasma-surface interaction via including specific surface reaction coefficients (electron yields, sticking coefficients, etc). In order to test the models rigorously, comparison with experimental 'benchmark data' is necessary. Examples will be given regarding the studies of electron power absorption modes in O2, and CF4-Ar discharges, as well as on the effect of modifications of the parameters of certain elementary processes on the computed discharge characteristics in O2 capacitively coupled plasmas.

Original languageEnglish
Article number014010
JournalPlasma Physics and Controlled Fusion
Volume60
Issue number1
DOIs
Publication statusPublished - Jan 1 2018

Fingerprint

molecular gases
Plasmas
Kinetics
kinetics
Gases
surface reactions
simulation
Plasma sources
Electrons
Surface reactions
Beam plasma interactions
Benchmarking
cold plasmas
coefficients
Charged particles
Gas mixtures
gas pressure
gas mixtures
Chemical reactions
chemical reactions

Keywords

  • capacitively coupled plasmas
  • electrical discharge processes
  • particle simulation

ASJC Scopus subject areas

  • Nuclear Energy and Engineering
  • Condensed Matter Physics

Cite this

Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases. / Donkó, Z.; Derzsi, A.; Korolov, I.; Hartmann, P.; Brandt, S.; Schulze, J.; Berger, B.; Koepke, M.; Bruneau, B.; Johnson, E.; Lafleur, T.; Booth, J. P.; Gibson, A. R.; O'Connell, D.; Gans, T.

In: Plasma Physics and Controlled Fusion, Vol. 60, No. 1, 014010, 01.01.2018.

Research output: Contribution to journalArticle

Donkó, Z, Derzsi, A, Korolov, I, Hartmann, P, Brandt, S, Schulze, J, Berger, B, Koepke, M, Bruneau, B, Johnson, E, Lafleur, T, Booth, JP, Gibson, AR, O'Connell, D & Gans, T 2018, 'Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases', Plasma Physics and Controlled Fusion, vol. 60, no. 1, 014010. https://doi.org/10.1088/1361-6587/aa8378
Donkó, Z. ; Derzsi, A. ; Korolov, I. ; Hartmann, P. ; Brandt, S. ; Schulze, J. ; Berger, B. ; Koepke, M. ; Bruneau, B. ; Johnson, E. ; Lafleur, T. ; Booth, J. P. ; Gibson, A. R. ; O'Connell, D. ; Gans, T. / Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases. In: Plasma Physics and Controlled Fusion. 2018 ; Vol. 60, No. 1.
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