Evaluation of ellipsometric measurements using complex strategies

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Results are presented of a study of the inverse problem of ellipsometry. In the lack of inverse equations, iterative methods (search) are needed to find the optimal parameters (global minimum) of the adaptive optical model. Different kinds of optical models and search strategies are demonstrated and compared for evaluating real ellipsometric measurements. It is also demonstrated that the well-known gradient search alone is useless if the search space is large (few a-priori information) or the error surface is hilly. The applied algorithms were built in a software, which is freely available at polgaro@mfa.kfki.hu.

Original languageEnglish
Pages (from-to)95-100
Number of pages6
JournalThin Solid Films
Volume455-456
DOIs
Publication statusPublished - May 1 2004

Fingerprint

evaluation
Ellipsometry
Iterative methods
Inverse problems
ellipsometry
computer programs
gradients

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Evaluation of ellipsometric measurements using complex strategies. / Polgár, O.; Fried, M.; Lohner, T.; Bársony, I.

In: Thin Solid Films, Vol. 455-456, 01.05.2004, p. 95-100.

Research output: Contribution to journalArticle

@article{af20eac2b2a8413abbf94e4d42018bad,
title = "Evaluation of ellipsometric measurements using complex strategies",
abstract = "Results are presented of a study of the inverse problem of ellipsometry. In the lack of inverse equations, iterative methods (search) are needed to find the optimal parameters (global minimum) of the adaptive optical model. Different kinds of optical models and search strategies are demonstrated and compared for evaluating real ellipsometric measurements. It is also demonstrated that the well-known gradient search alone is useless if the search space is large (few a-priori information) or the error surface is hilly. The applied algorithms were built in a software, which is freely available at polgaro@mfa.kfki.hu.",
author = "O. Polg{\'a}r and M. Fried and T. Lohner and I. B{\'a}rsony",
year = "2004",
month = "5",
day = "1",
doi = "10.1016/j.tsf.2003.12.051",
language = "English",
volume = "455-456",
pages = "95--100",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",

}

TY - JOUR

T1 - Evaluation of ellipsometric measurements using complex strategies

AU - Polgár, O.

AU - Fried, M.

AU - Lohner, T.

AU - Bársony, I.

PY - 2004/5/1

Y1 - 2004/5/1

N2 - Results are presented of a study of the inverse problem of ellipsometry. In the lack of inverse equations, iterative methods (search) are needed to find the optimal parameters (global minimum) of the adaptive optical model. Different kinds of optical models and search strategies are demonstrated and compared for evaluating real ellipsometric measurements. It is also demonstrated that the well-known gradient search alone is useless if the search space is large (few a-priori information) or the error surface is hilly. The applied algorithms were built in a software, which is freely available at polgaro@mfa.kfki.hu.

AB - Results are presented of a study of the inverse problem of ellipsometry. In the lack of inverse equations, iterative methods (search) are needed to find the optimal parameters (global minimum) of the adaptive optical model. Different kinds of optical models and search strategies are demonstrated and compared for evaluating real ellipsometric measurements. It is also demonstrated that the well-known gradient search alone is useless if the search space is large (few a-priori information) or the error surface is hilly. The applied algorithms were built in a software, which is freely available at polgaro@mfa.kfki.hu.

UR - http://www.scopus.com/inward/record.url?scp=17144461544&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=17144461544&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2003.12.051

DO - 10.1016/j.tsf.2003.12.051

M3 - Article

VL - 455-456

SP - 95

EP - 100

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

ER -