Evaluation of ellipsometric measurements using complex strategies

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9 Citations (Scopus)

Abstract

Results are presented of a study of the inverse problem of ellipsometry. In the lack of inverse equations, iterative methods (search) are needed to find the optimal parameters (global minimum) of the adaptive optical model. Different kinds of optical models and search strategies are demonstrated and compared for evaluating real ellipsometric measurements. It is also demonstrated that the well-known gradient search alone is useless if the search space is large (few a-priori information) or the error surface is hilly. The applied algorithms were built in a software, which is freely available at polgaro@mfa.kfki.hu.

Original languageEnglish
Pages (from-to)95-100
Number of pages6
JournalThin Solid Films
Volume455-456
DOIs
Publication statusPublished - May 1 2004
EventThe 3rd International Conference on Spectroscopic Ellipsometry - Vienna, Austria
Duration: Jul 6 2003Jul 11 2003

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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