Error analysis of Makyoh-topography surface height profile measurements

I. E. Lukács, F. Riesz

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The errors of surface profile measurements using grid-illumination Makyoh topography is analysed using computer simulations. It is shown that two regions of imaging exists: at smooth surfaces and small screen-to-sample distances, the error is determined by the pixel reading error, while at less smooth surfaces and larger screen-to-sample distances, the errors of summation approximation dominates. The pixel reading error component can be decreased by increasing the screen-to-sample distance. It is demonstrated that the described evaluation algorithm gives maximum relative errors of roughly 1.5%.

Original languageEnglish
Pages (from-to)385-388
Number of pages4
JournalEPJ Applied Physics
Volume27
Issue number1-3
DOIs
Publication statusPublished - Jul 2004

Fingerprint

error analysis
Surface topography
Error analysis
topography
profiles
Pixels
pixels
Surface measurement
Topography
computerized simulation
Lighting
illumination
grids
Imaging techniques
evaluation
Computer simulation
approximation

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Error analysis of Makyoh-topography surface height profile measurements. / Lukács, I. E.; Riesz, F.

In: EPJ Applied Physics, Vol. 27, No. 1-3, 07.2004, p. 385-388.

Research output: Contribution to journalArticle

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