Energy shift and broadening of the spectra of electrons backscattered elastically from solid surfaces

D. Varga, K. Tőkési, Z. Berényi, J. Tóth, L. Kövér, G. Gergely, A. Sulyok

Research output: Contribution to journalArticle

39 Citations (Scopus)

Abstract

In the present work our experimental results on the energy shifts and energy widths (full width of half-maximum) of the quasi-elastic peaks (1-5 keV) obtained using a high-energy-resolution electron spectrometer and different (C, Si, Ni and Au) surfaces are compared with those calculated by assuming single elastic scattering on free atoms having a Maxwell-Boltzmann thermal velocity distribution. There is a good agreement in the case of the energy shifts as well as for the energy broadenings obtained using higher atomic number polycrystalline samples (Ni, Au). In the case of Si, however, the measured energy broadening is systematically larger by 15-20% than the calculated broadening for the whole primary beam energy range. Compared with the calculated values, considerably larger broadenings (by 30-60%, depending on the primary beam energy) were observed for carbonic samples. The contribution of the multiple elastic scattering to the yield of the electrons backscattered elastically, and the effect of the multiple scattering on the energy shifts and Doppler broadenings, have been determined using Monte Carlo simulations. Our results show that multiple scattering causes only small changes in energy shifts and energy broadenings of elastic peaks in the case of the samples and primary electron energy region studied.

Original languageEnglish
Pages (from-to)1019-1026
Number of pages8
JournalSurface and Interface Analysis
Volume31
Issue number11
DOIs
Publication statusPublished - Nov 2001

Fingerprint

Multiple scattering
solid surfaces
Elastic scattering
Electrons
shift
electrons
Doppler effect
Velocity distribution
energy
Spectrometers
Atoms
elastic scattering
scattering
velocity distribution
spectrometers
electron energy

Keywords

  • Doppler broadening
  • Elastic electron backscattering
  • Monte Carlo simulation
  • Recoil energy shift

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Colloid and Surface Chemistry

Cite this

Energy shift and broadening of the spectra of electrons backscattered elastically from solid surfaces. / Varga, D.; Tőkési, K.; Berényi, Z.; Tóth, J.; Kövér, L.; Gergely, G.; Sulyok, A.

In: Surface and Interface Analysis, Vol. 31, No. 11, 11.2001, p. 1019-1026.

Research output: Contribution to journalArticle

@article{c9259d9dc3e74414a95bd659ac6249d7,
title = "Energy shift and broadening of the spectra of electrons backscattered elastically from solid surfaces",
abstract = "In the present work our experimental results on the energy shifts and energy widths (full width of half-maximum) of the quasi-elastic peaks (1-5 keV) obtained using a high-energy-resolution electron spectrometer and different (C, Si, Ni and Au) surfaces are compared with those calculated by assuming single elastic scattering on free atoms having a Maxwell-Boltzmann thermal velocity distribution. There is a good agreement in the case of the energy shifts as well as for the energy broadenings obtained using higher atomic number polycrystalline samples (Ni, Au). In the case of Si, however, the measured energy broadening is systematically larger by 15-20{\%} than the calculated broadening for the whole primary beam energy range. Compared with the calculated values, considerably larger broadenings (by 30-60{\%}, depending on the primary beam energy) were observed for carbonic samples. The contribution of the multiple elastic scattering to the yield of the electrons backscattered elastically, and the effect of the multiple scattering on the energy shifts and Doppler broadenings, have been determined using Monte Carlo simulations. Our results show that multiple scattering causes only small changes in energy shifts and energy broadenings of elastic peaks in the case of the samples and primary electron energy region studied.",
keywords = "Doppler broadening, Elastic electron backscattering, Monte Carlo simulation, Recoil energy shift",
author = "D. Varga and K. Tők{\'e}si and Z. Ber{\'e}nyi and J. T{\'o}th and L. K{\"o}v{\'e}r and G. Gergely and A. Sulyok",
year = "2001",
month = "11",
doi = "10.1002/sia.1121",
language = "English",
volume = "31",
pages = "1019--1026",
journal = "Surface and Interface Analysis",
issn = "0142-2421",
publisher = "John Wiley and Sons Ltd",
number = "11",

}

TY - JOUR

T1 - Energy shift and broadening of the spectra of electrons backscattered elastically from solid surfaces

AU - Varga, D.

AU - Tőkési, K.

AU - Berényi, Z.

AU - Tóth, J.

AU - Kövér, L.

AU - Gergely, G.

AU - Sulyok, A.

PY - 2001/11

Y1 - 2001/11

N2 - In the present work our experimental results on the energy shifts and energy widths (full width of half-maximum) of the quasi-elastic peaks (1-5 keV) obtained using a high-energy-resolution electron spectrometer and different (C, Si, Ni and Au) surfaces are compared with those calculated by assuming single elastic scattering on free atoms having a Maxwell-Boltzmann thermal velocity distribution. There is a good agreement in the case of the energy shifts as well as for the energy broadenings obtained using higher atomic number polycrystalline samples (Ni, Au). In the case of Si, however, the measured energy broadening is systematically larger by 15-20% than the calculated broadening for the whole primary beam energy range. Compared with the calculated values, considerably larger broadenings (by 30-60%, depending on the primary beam energy) were observed for carbonic samples. The contribution of the multiple elastic scattering to the yield of the electrons backscattered elastically, and the effect of the multiple scattering on the energy shifts and Doppler broadenings, have been determined using Monte Carlo simulations. Our results show that multiple scattering causes only small changes in energy shifts and energy broadenings of elastic peaks in the case of the samples and primary electron energy region studied.

AB - In the present work our experimental results on the energy shifts and energy widths (full width of half-maximum) of the quasi-elastic peaks (1-5 keV) obtained using a high-energy-resolution electron spectrometer and different (C, Si, Ni and Au) surfaces are compared with those calculated by assuming single elastic scattering on free atoms having a Maxwell-Boltzmann thermal velocity distribution. There is a good agreement in the case of the energy shifts as well as for the energy broadenings obtained using higher atomic number polycrystalline samples (Ni, Au). In the case of Si, however, the measured energy broadening is systematically larger by 15-20% than the calculated broadening for the whole primary beam energy range. Compared with the calculated values, considerably larger broadenings (by 30-60%, depending on the primary beam energy) were observed for carbonic samples. The contribution of the multiple elastic scattering to the yield of the electrons backscattered elastically, and the effect of the multiple scattering on the energy shifts and Doppler broadenings, have been determined using Monte Carlo simulations. Our results show that multiple scattering causes only small changes in energy shifts and energy broadenings of elastic peaks in the case of the samples and primary electron energy region studied.

KW - Doppler broadening

KW - Elastic electron backscattering

KW - Monte Carlo simulation

KW - Recoil energy shift

UR - http://www.scopus.com/inward/record.url?scp=0035505479&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035505479&partnerID=8YFLogxK

U2 - 10.1002/sia.1121

DO - 10.1002/sia.1121

M3 - Article

AN - SCOPUS:0035505479

VL - 31

SP - 1019

EP - 1026

JO - Surface and Interface Analysis

JF - Surface and Interface Analysis

SN - 0142-2421

IS - 11

ER -